scholarly journals Atomic layer deposition of cubic tin–calcium sulfide alloy films

2019 ◽  
Vol 35 (7) ◽  
pp. 795-803 ◽  
Author(s):  
Chuanxi Yang ◽  
Xizhu Zhao ◽  
Sang Bok Kim ◽  
Laura T. Schelhas ◽  
Xiabing Lou ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Calcium Sulfide ◽  
Alloy Films ◽  
Layer Deposition ◽  
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Abstract

scholarly journals Role of oligomer structures in the surface chemistry of amidinate metal complexes used for atomic layer deposition of thin films

2019 ◽  
Vol 35 (7) ◽  
pp. 720-731 ◽  
Author(s):  
Jonathan Guerrero-Sánchez ◽  
Bo Chen ◽  
Noboru Takeuchi ◽  
Francisco Zaera
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Metal Complexes ◽  
Atomic Layer ◽  
Layer Deposition ◽  
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Abstract

Surface modification and fabrication of 3D nanostructures by atomic layer deposition

MRS Bulletin ◽  
2011 ◽  
Vol 36 (11) ◽  
pp. 887-897 ◽  
Author(s):  
Changdeuck Bae ◽  
Hyunjung Shin ◽  
Kornelius Nielsch
Keyword(s):  
Surface Modification ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
3D Nanostructures ◽  
Layer Deposition ◽  
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Abstract

Atomic Layer Deposition of Ir−Pt Alloy Films

2010 ◽  
Vol 22 (8) ◽  
pp. 2517-2525 ◽  
Author(s):  
Steven T. Christensen ◽  
Jeffrey W. Elam
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Alloy Films ◽  
Layer Deposition ◽  
Pt Alloy

Atomic layer deposition of epitaxial HfO2 thin films on r-cut sapphire

2013 ◽  
Vol 28 (13) ◽  
pp. 1680-1686 ◽  
Author(s):  
Hugo Mändar ◽  
Raul Rammula ◽  
Aleks Aidla ◽  
Jaan Aarik
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Image Position

Abstract

scholarly journals Atomic layer deposition of zirconium oxide thin films

2019 ◽  
Vol 35 (7) ◽  
pp. 804-812
Author(s):  
Xin Wang ◽  
Sujan Kumar Ghosh ◽  
Mahyar Afshar-Mohajer ◽  
Hua Zhou ◽  
Yongqiang Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Zirconium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
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Abstract

Controllable atomic layer deposition coatings to boost the performance of LiMnxCoyNi1−x−yO2 in lithium-ion batteries: A review

2020 ◽  
Vol 35 (7) ◽  
pp. 762-774 ◽  
Author(s):  
Kang Wu ◽  
Wenbin Li ◽  
Jian Qin ◽  
Youchen Hao ◽  
Hirbod Maleki Kheimeh Sari ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Lithium Ion Batteries ◽  
Lithium Ion ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Image Position

Abstract

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