The surface morphological evolution of ultrathin SiC buffer layer grown on Si (100) substrate by atmospheric pressure chemical vapor deposition
2012 ◽
Vol 28
(1)
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pp. 113-119
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Keyword(s):
Abstract
2018 ◽
Vol 33
(9)
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pp. 1088-1108
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1995 ◽
Vol 24
(6)
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pp. 761-766
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Keyword(s):
2020 ◽
Vol 67
(10)
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pp. 4245-4249
2017 ◽
Vol 27
(13)
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pp. 1606469
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Keyword(s):
2006 ◽
Vol 45
(8A)
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pp. 6342-6345
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