Numerical analysis of different methods to calculate residual stresses in thin films based on instrumented indentation data

2012 ◽  
Vol 27 (13) ◽  
pp. 1732-1741 ◽  
Author(s):  
Carlos Eduardo Keutenedjian Mady ◽  
Sara Aida Rodriguez ◽  
Adriana Gómez Gómez ◽  
Roberto Martins Souza
Keyword(s):  
Thin Films ◽  
Numerical Analysis ◽  
Residual Stresses ◽  
Instrumented Indentation ◽  
Image Position

Abstract

Fem Simulation of Micro-Rotating-Structures and Their Applications in Measurement of Residual Stresses in Thin Films

1997 ◽  
Vol 505 ◽  
Author(s):  
Xin Zhang ◽  
Tong-Yi Zhang ◽  
Yitshak Zohar
Keyword(s):  
Thin Films ◽  
Residual Stresses ◽  
Fem Simulation ◽  
Sensitivity Factor ◽  
Local Measurement ◽  
Micro Structure ◽  
Micro Raman Spectroscopy ◽  
Before And After ◽  
Polysilicon Films ◽  
Simulation Results

ABSTRACTFEM simulation of micro-rotating-structures was performed for local measurement of residual stresses in thin films. A sensitivity factor is introduced, studied and tabulated from the simulation results. The residual stress can be evaluated from the rotating deflection, the lengths of rotating and fixed beams, and the sensitivity factor. The micro-structure technique was applied to measure residual stresses in both silicon nitride and polysilicon thin films, before and after rapid thermal annealing (RTA), and further confirmed by wafer curvature method. Residual stresses in polysilicon films at different RTA stages were also characterized by micro-Raman spectroscopy (MRS). The experimental results indicate that micro-rotating-structures indeed have the ability to measure spatially and locally residual stresses in MEMS thin films with appropriate sensitivities.

Instrumented indentation on alumina–alumina/zirconia multilayered composites with residual stresses

2006 ◽  
Vol 86 (33-35) ◽  
pp. 5371-5382 ◽  
Author(s):  
E. Jiménez-Piqué ◽  
L. Ceseracciu ◽  
Y. Gaillard ◽  
M. Barch ◽  
G. De Portu ◽  
...  
Keyword(s):  
Residual Stresses ◽  
Instrumented Indentation ◽  
Multilayered Composites

Synthesis and characterization of Ni incorporated titanium dioxide thin films

2018 ◽  
Vol 33 (24) ◽  
pp. 4165-4172 ◽  
Author(s):  
Deepak Kumar ◽  
Prasanta Mandal ◽  
Anil Singh ◽  
Charu Pant ◽  
Sudesh Sharma
Keyword(s):  
Thin Films ◽  
Titanium Dioxide ◽  
Synthesis And Characterization ◽  
Titanium Dioxide Thin Films ◽  
Image Position

Abstract

Microstructure and dielectric properties with CuO additions to liquid phase sintered BaTiO3 thin films

2016 ◽  
Vol 31 (8) ◽  
pp. 1018-1026 ◽  
Author(s):  
David T. Harris ◽  
Matthew J. Burch ◽  
Edward J. Mily ◽  
Elizabeth C. Dickey ◽  
Jon-Paul Maria
Keyword(s):  
Thin Films ◽  
Dielectric Properties ◽  
Liquid Phase ◽  
Image Position

Abstract

Residual Stresses in Cu/Ni Multilayer Thin Films Measured Using the Sin2ψ Method

2018 ◽  
Vol 59 (1) ◽  
pp. 111-120 ◽  
Author(s):  
I. G. McDonald ◽  
W. M. Moehlenkamp ◽  
D. Arola ◽  
J. Wang
Keyword(s):  
Thin Films ◽  
Residual Stresses ◽  
Multilayer Thin Films
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