Growth, structure, and mechanical properties of transition metal carbide superlattices
2001 ◽
Vol 16
(5)
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pp. 1301-1310
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Keyword(s):
Superlattices of TiC/VC have been deposited on MgO(001) substrates by simultaneous direct current metal magnetron sputtering and C60 evaporation in the temperature range 200–800 °C. Thin superlattices (approximately 1000 Å) deposited at 400 °C exhibited an epitaxial growth with abrupt interfaces while films deposited at 200 °C showed a partial loss of epitaxy. At 800 °C roughening by surface diffusion started to degrade the superlattices and introduced a columnar microstructure. A loss of epitaxy was observed for thicker (>7000 Å) superlattice films deposited at 400 °C. The results suggest that this observation is due to difficulties in depositing epitaxial VC.
2017 ◽
Vol 114
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pp. 234-244
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Keyword(s):
Keyword(s):
2003 ◽
Vol 21
(4)
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pp. 851-859
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