Generation of microwave plasma under high pressure and fabrication of ultrafine carbon particles
1998 ◽
Vol 13
(6)
◽
pp. 1724-1727
◽
Keyword(s):
A microwave plasma generator, which functions under high pressure, has been developed and used in the fabrication of fine carbon particles. The plasma generator is a two-stage-type resonator, which consists of rectangular and semi-cylindrical-type resonators which are coupled in series for torching plasma and keeping it stable under high pressure. The plasma can be torched in helium gas at 3 × 106 Pa by tuning the dimensions of apparatus elements. Fine carbon particles of ~50 nm are obtained using a mixture of helium and methane gas. The particles are found to be crystalline from the results of transparent electron microscopy and diffraction analysis.
2014 ◽
Vol 608
◽
pp. 68-72
◽
Keyword(s):
Keyword(s):
1991 ◽
Vol 49
◽
pp. 64-65
Keyword(s):
1989 ◽
Vol 47
◽
pp. 44-45
1990 ◽
Vol 48
(1)
◽
pp. 384-385
2004 ◽
Vol 27
(1-3)
◽
pp. 415-418
2015 ◽
2010 ◽
Keyword(s):