Characterization of Si/Mg2Si multilayer mirrors manufactured by sputtering of Mg and Si targets

2021 ◽  
Vol 27 (4) ◽  
Keyword(s):  
Multilayer Mirrors

Fabrication and characterization of EUV multilayer mirrors optimized for small spectral reflection bandwidth

2001 ◽  
Vol 72 (1) ◽  
pp. 121-124 ◽  
Author(s):  
Y.C. Lim ◽  
T. Westerwalbesloh ◽  
A. Aschentrup ◽  
O. Wehmeyer ◽  
G. Haindl ◽  
...  
Keyword(s):  
Multilayer Mirrors ◽  
Spectral Reflection ◽  
Fabrication And Characterization

scholarly journals Detection and characterization of carbon contamination on EUV multilayer mirrors

2009 ◽  
Vol 17 (19) ◽  
pp. 16969 ◽  
Author(s):  
Juequan Chen ◽  
Eric Louis ◽  
Chris J. Lee ◽  
Herbert Wormeester ◽  
Reinhard Kunze ◽  
...  
Keyword(s):  
Multilayer Mirrors ◽  
Carbon Contamination

scholarly journals Fabrication and characterization of Sb/B4C multilayer mirrors for soft X-rays

2014 ◽  
Vol 307 ◽  
pp. 360-364 ◽  
Author(s):  
I.A. Kopylets ◽  
V.V. Kondratenko ◽  
E.N. Zubarev ◽  
D.L. Voronov ◽  
E.M. Gullikson ◽  
...  
Keyword(s):  
X Rays ◽  
Multilayer Mirrors ◽  
Fabrication And Characterization

Characterization of periodic multilayer mirrors optimized for single attosecond pulse reflection

Optik ◽  
2013 ◽  
Vol 124 (11) ◽  
pp. 990-993 ◽  
Author(s):  
Chengyou Lin ◽  
Shujing Chen ◽  
Dahe Liu
Keyword(s):  
Attosecond Pulse ◽  
Multilayer Mirrors

Characterization of Mo/B 4 C soft x-ray multilayer mirrors for 7.3- to 8.0-nm radiation

1998 ◽  
Author(s):  
Junxia Lu ◽  
Yueying Ma ◽  
Shu Pei ◽  
Jianlin Cao ◽  
Xingdan Chen
Keyword(s):  
Multilayer Mirrors ◽  
X Ray

Design, deposition, and characterization of multilayer mirrors for ultrashort pulses in the attosecond domain

2011 ◽  
Author(s):  
S. de Rossi ◽  
C. Bourassin-Bouchet ◽  
E. Meltchakov ◽  
F. Delmotte ◽  
Zsolt Diveki ◽  
...  
Keyword(s):  
Ultrashort Pulses ◽  
Multilayer Mirrors

Combine Spectroscopic Ellipsometry and Grazing X-ray Reflectance for Fine Characterization of Complex Epitaxial Structures

1995 ◽  
Vol 405 ◽  
Author(s):  
P. Boher ◽  
J. L. Stehle
Keyword(s):  
Complex Systems ◽  
Spectroscopic Ellipsometry ◽  
Fourier Transformation ◽  
Structural Information ◽  
Multilayer Mirrors ◽  
Reflectance Curve ◽  
X Ray

AbstractSpectroscopic Ellipsometry (SE) and Grazing X-ray Reflectance (GXR) techniques are applied on different III-V epitaxial structures in order to extract accurately their structural information. Thickness information are obtained directly from Fourier transformation of the GXR spectra and confirmed by simulation of the reflectance curve. Compositions are deduced from SE regression using GXR thickness as input values. Examples on monolayer and bilayer structures are first remembered. Then the potentiality of the method is demonstrated to more complex systems (multilayer mirrors and HEMT structures).

Phase characterization of attosecond multilayer mirrors: from EUV to soft x-rays

2014 ◽  
Author(s):  
Franck Delmotte ◽  
Charles Bourassin-Bouchet ◽  
Sébastien de Rossi ◽  
Evgueni Meltchakov ◽  
Angelo Giglia ◽  
...  
Keyword(s):  
X Rays ◽  
Multilayer Mirrors ◽  
Phase Characterization

Fabrication and characterization of beryllium-based multilayer mirrors for soft x-rays

1992 ◽  
Author(s):  
Judith A. Ruffner ◽  
Jon M. Slaughter ◽  
Patrick A. Kearney ◽  
Charles M. Falco
Keyword(s):  
X Rays ◽  
Multilayer Mirrors ◽  
Fabrication And Characterization
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