Characterization of Mo/B 4 C soft x-ray multilayer mirrors for 7.3- to 8.0-nm radiation

1998 ◽  
Author(s):  
Junxia Lu ◽  
Yueying Ma ◽  
Shu Pei ◽  
Jianlin Cao ◽  
Xingdan Chen
Keyword(s):  
Multilayer Mirrors ◽  
X Ray

Combine Spectroscopic Ellipsometry and Grazing X-ray Reflectance for Fine Characterization of Complex Epitaxial Structures

1995 ◽  
Vol 405 ◽  
Author(s):  
P. Boher ◽  
J. L. Stehle
Keyword(s):  
Complex Systems ◽  
Spectroscopic Ellipsometry ◽  
Fourier Transformation ◽  
Structural Information ◽  
Multilayer Mirrors ◽  
Reflectance Curve ◽  
X Ray

AbstractSpectroscopic Ellipsometry (SE) and Grazing X-ray Reflectance (GXR) techniques are applied on different III-V epitaxial structures in order to extract accurately their structural information. Thickness information are obtained directly from Fourier transformation of the GXR spectra and confirmed by simulation of the reflectance curve. Compositions are deduced from SE regression using GXR thickness as input values. Examples on monolayer and bilayer structures are first remembered. Then the potentiality of the method is demonstrated to more complex systems (multilayer mirrors and HEMT structures).

Combine spectroscopic ellipsometry and grazing x-ray reflectance for fine characterization of complex epitaxial structures

1995 ◽  
Vol 406 ◽  
Author(s):  
P. Boher ◽  
J. L. Stehle
Keyword(s):  
Complex Systems ◽  
Spectroscopic Ellipsometry ◽  
Fourier Transformation ◽  
Structural Information ◽  
Multilayer Mirrors ◽  
Reflectance Curve ◽  
X Ray

AbstractMSpectroscopic Ellipsometry (SE) and Grazing X-ray Reflectance (GXR) techniques are applied on different III-V epitaxial structures in order to extract accurately their structural information. Thickness information are obtained directly from Fourier transformation of the GXR spectra and confirmed by simulation of the reflectance curve. Compositions are deduced from SE regression using GXR thickness as input values. Examples on monolayer and bilayer structures are first remembered. Then the potentiality of the method is demonstrated to more complex systems (multilayer mirrors and HEMT structures).

Characterization of heat-treated CN films fabricated by dual-facing-target sputtering for soft X-ray multilayer mirrors

1999 ◽  
Vol 69 (6) ◽  
pp. 641-647 ◽  
Author(s):  
H.L. Bai ◽  
E.Y. Jiang ◽  
P. Wu ◽  
Z.D. Lou ◽  
Y. Wang ◽  
...  
Keyword(s):  
Multilayer Mirrors ◽  
X Ray ◽  
Heat Treated ◽  
Facing Target Sputtering

Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering

Vacuum ◽  
2009 ◽  
Vol 84 (1) ◽  
pp. 19-25 ◽  
Author(s):  
P. Siffalovic ◽  
E. Majkova ◽  
L. Chitu ◽  
M. Jergel ◽  
S. Luby ◽  
...  
Keyword(s):  
Small Angle ◽  
Grazing Incidence ◽  
Multilayer Mirrors ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

A Vacuum Soft X-Ray Reflectometer for the Characterization of Multilayer Mirrors by Synchrotron Radiation at DAΦNE

2007 ◽  
Author(s):  
Gianfelice Cinque ◽  
Agostino Raco ◽  
Antonietta Frani ◽  
Antonio Grilli ◽  
Augusto Marcelli ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Multilayer Mirrors ◽  
X Ray

Tests and characterization of a laterally graded multilayer Montel mirror

2013 ◽  
Vol 21 (1) ◽  
pp. 16-23 ◽  
Author(s):  
K. Mundboth ◽  
J. Sutter ◽  
D. Laundy ◽  
S. Collins ◽  
S. Stoupin ◽  
...  
Keyword(s):  
Experimental Data ◽  
High Resolution ◽  
Ray Tracing ◽  
Multilayer Mirrors ◽  
Ray Optics ◽  
X Ray ◽  
X Ray Scattering ◽  
Photon Source ◽  
Ray Scattering

Multilayers are becoming an increasingly important tool in X-ray optics. The essential parameters to design a pair of laterally graded multilayer mirrors arranged in a Montel-type configuration for use as an X-ray collimating device are provided. The results of X-ray reflectometry tests carried out on the optics in addition to metrology characterization are also shown. Finally, using experimental data and combined with X-ray tracing simulations it is demonstrated that the mirror meets all stringent specifications as required for a novel ultra-high-resolution inelastic X-ray scattering spectrometer at the Advanced Photon Source.

Preliminary synchrotron radiation characterization of first multilayer mirrors for the soft X-ray water window

2007 ◽  
Vol 62 (6-7) ◽  
pp. 586-592 ◽  
Author(s):  
Gianfelice Cinque ◽  
Antonio Grilli ◽  
Giannantonio Cibin ◽  
Agostino Raco ◽  
Alessandro Patelli ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Multilayer Mirrors ◽  
X Ray ◽  
Water Window

The Use of Advanced Analytical Techniques for Characterization of the Chemical, Physical, and Crystallographic Nature of a Surface

1973 ◽  
Vol 31 ◽  
pp. 132-133 ◽  
Author(s):  
R. E. Herfert
Keyword(s):  
Surface Characterization ◽  
Analytical Techniques ◽  
X Ray Diffraction ◽  
Depth Of Penetration ◽  
X Ray ◽  
The Past ◽  
Transmission Electron ◽  
Scanning Electron

Studies of the nature of a surface, either metallic or nonmetallic, in the past, have been limited to the instrumentation available for these measurements. In the past, optical microscopy, replica transmission electron microscopy, electron or X-ray diffraction and optical or X-ray spectroscopy have provided the means of surface characterization. Actually, some of these techniques are not purely surface; the depth of penetration may be a few thousands of an inch. Within the last five years, instrumentation has been made available which now makes it practical for use to study the outer few 100A of layers and characterize it completely from a chemical, physical, and crystallographic standpoint. The scanning electron microscope (SEM) provides a means of viewing the surface of a material in situ to magnifications as high as 250,000X.

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