X-RAY PHOTOELECTRON STUDY OF THE EFFECT OF THE COMPOSITION OF THE INITIAL GAS PHASE ON CHANGES IN THE ELECTRONIC STRUCTURE OF HEXAGONAL BORON NITRIDE FILMS OBTAINED BY PECVD FROM BORAZINE
2016 ◽
Vol 57
(4)
◽
pp. 670-678
◽
Keyword(s):
2019 ◽
Vol 123
(23)
◽
pp. 14797-14802
◽
2018 ◽
Vol 6
(3)
◽
pp. 036306
◽
Keyword(s):
2011 ◽
Vol 53
(1)
◽
pp. 41-47
◽
2018 ◽
Vol 10
(50)
◽
pp. 43936-43945
◽
Keyword(s):