X-RAY PHOTOELECTRON STUDY OF THE EFFECT OF THE COMPOSITION OF THE INITIAL GAS PHASE ON CHANGES IN THE ELECTRONIC STRUCTURE OF HEXAGONAL BORON NITRIDE FILMS OBTAINED BY PECVD FROM BORAZINE

1990 ◽  
Vol 201 ◽  
Author(s):  
G. L. Doll ◽  
T. A. Perry ◽  
J. A. Sell

AbstractThe laser-induced changes in the hexagonal boron nitride targets that are used in the deposition of pulsed laser-deposited cubic boron nitride films are examined. Although the structure of the hexagonal boron nitride in the irradiated areas is unaltered, the surface morphology changes considerably. Boron-rich spheroids were found to cover the irradiated area. Their origin is consistent with the hydrodynamic sputtering of the hexagonal boron nitride targets, and a liberation of nitrogen atoms to the gas phase.


1991 ◽  
Vol 228 ◽  
Author(s):  
P. K. Banerjee ◽  
B. Chaterjee ◽  
J. S. Kim ◽  
S. S. Mitra

ABSTRACTBoron nitride films were deposited by rf reactive sputtering. The composition of the film was determined by X-ray photo-electron spectroscopy(XPS). Optical properties of boron nitride were studied by IR spectroscopy. Resultant films showed optical characteristics similar to those of hexagonal boron nitride. The ratio of boron to nitrogen was varied from 3.11 to 1.45 by varying the amount of nitrogen. Resulting films have refractive index in the range of 2.05 – 3.21.


2019 ◽  
Vol 123 (23) ◽  
pp. 14797-14802 ◽  
Author(s):  
Xu Han ◽  
Jiangxiazi Lin ◽  
Junwei Liu ◽  
Ning Wang ◽  
Ding Pan

Nanoscale ◽  
2021 ◽  
Author(s):  
Yifei Li ◽  
Xin Wen ◽  
Changjie Tan ◽  
Ning Li ◽  
Ruijie Li ◽  
...  

Owing to its irreplaceable roles in new functional devices, such as universal substrates and excellent layered insulators, high-quality hexagonal BN (hBN) crystals are exceedingly required in the field of two-dimensional...


2011 ◽  
Vol 53 (1) ◽  
pp. 41-47 ◽  
Author(s):  
A. T. Kozakov ◽  
K. A. Guglev ◽  
V. V. Ilyasov ◽  
I. V. Ershov ◽  
A. V. Nikol’skii ◽  
...  

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