Effects of Excimer Laser Ablation on the Surface of Hexagonal Boron Nitride

1990 ◽  
Vol 201 ◽  
Author(s):  
G. L. Doll ◽  
T. A. Perry ◽  
J. A. Sell
Keyword(s):  
Laser Ablation ◽  
Boron Nitride ◽  
Gas Phase ◽  
Hexagonal Boron Nitride ◽  
Cubic Boron Nitride ◽  
Pulsed Laser ◽  
Excimer Laser Ablation ◽  
Induced Changes ◽  
Boron Nitride Films ◽  
Morphology Changes

AbstractThe laser-induced changes in the hexagonal boron nitride targets that are used in the deposition of pulsed laser-deposited cubic boron nitride films are examined. Although the structure of the hexagonal boron nitride in the irradiated areas is unaltered, the surface morphology changes considerably. Boron-rich spheroids were found to cover the irradiated area. Their origin is consistent with the hydrodynamic sputtering of the hexagonal boron nitride targets, and a liberation of nitrogen atoms to the gas phase.

Ion‐assisted pulsed laser deposition of cubic boron nitride films

1994 ◽  
Vol 76 (5) ◽  
pp. 3088-3101 ◽  
Author(s):  
T. A. Friedmann ◽  
P. B. Mirkarimi ◽  
D. L. Medlin ◽  
K. F. McCarty ◽  
E. J. Klaus ◽  
...  
Keyword(s):  
Boron Nitride ◽  
Pulsed Laser Deposition ◽  
Cubic Boron Nitride ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Boron Nitride Films

Selective chemical etching of hexagonal boron nitride compared to cubic boron nitride

1997 ◽  
Vol 12 (2) ◽  
pp. 412-415 ◽  
Author(s):  
Stephen J. Harris ◽  
Anita M. Weiner ◽  
Gary L. Doll ◽  
Wen-Jin Meng
Keyword(s):  
Boron Nitride ◽  
Gas Phase ◽  
Chemical Etching ◽  
Hexagonal Boron Nitride ◽  
Cubic Boron Nitride ◽  
Chemical Etch ◽  
Selective Chemical ◽  
Hot Filament ◽  
Selective Chemical Etching ◽  
Phase Chemical

A BN film containing comparable amounts of sp2 and sp3 phases was subjected to a gas-phase chemical etch in a hot-filament environment containing 1% CH4 in H2. After a partial etch, examination by FTIR shows that the sp2 was preferentially etched, leaving a larger sp3 fraction than in the unetched film. The possibility that preferential etching could be used to increase the purity of cBN films is discussed.

Stresses in pulsed laser deposited cubic boron nitride films

2002 ◽  
Vol 11 (3-6) ◽  
pp. 1276-1280 ◽  
Author(s):  
Guenter Reisse ◽  
Steffen Weissmantel ◽  
Dirk Rost
Keyword(s):  
Boron Nitride ◽  
Cubic Boron Nitride ◽  
Pulsed Laser ◽  
Boron Nitride Films

Cubic boron nitride deposition on silicon substrates at room temperature by KrF excimer laser ablation of h-BN

2000 ◽  
Vol 70 (2) ◽  
pp. 197-201 ◽  
Author(s):  
S. Acquaviva ◽  
G. Leggieri ◽  
A. Luches ◽  
A. Perrone ◽  
A. Zocco ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Boron Nitride ◽  
Excimer Laser ◽  
Room Temperature ◽  
Cubic Boron Nitride ◽  
Silicon Substrates ◽  
Excimer Laser Ablation ◽  
Krf Excimer Laser
Sign in / Sign up

Export Citation Format

Share Document