FORMATION OF SILICON NANOCRYSTALS IN Si-SiO2-a-Si-SiO2 HETEROSTRUCTURES DURING HIGH-TEMPERATURE ANNEALING: EXPERIMENT AND SIMULATION
2016 ◽
Vol 52
(5)
◽
pp. 486-495
◽
2013 ◽
Vol 210
(4)
◽
pp. 669-675
◽
Defect reduction in oxygen implanted silicon-on-insulator material during high-temperature annealing
1989 ◽
Vol 47
◽
pp. 604-605