Polyimide-Substrate Effects During Wet Chemical Processing of Polyimide Films in VLSI
Keyword(s):
2020 ◽
Vol 9
(8)
◽
pp. 084002
2012 ◽
Vol 624
◽
pp. 42-46
◽
2012 ◽
Vol 55
(12)
◽
pp. 3405-3410
◽
1992 ◽
Vol 139
(8)
◽
pp. 2133-2142
◽
2006 ◽
Vol 45
◽
pp. 1252-1259