Variation of Transmittance Spectra of Porous Antireflection Coatings with Index Profile

2008 ◽  
pp. 217-217-16
Author(s):  
D Milam ◽  
GG Peterson
Author(s):  
Brennan Davis ◽  
Wilson Chi

Abstract The use of an antireflection coating for backside semiconductor failure analysis is discussed. The process of selecting an appropriate coating is described. Several known coatings are also described in regards to imaging quality, material properties, and the benefits to device analysis applications.


1978 ◽  
Vol 14 (14) ◽  
pp. 416 ◽  
Author(s):  
J.P. Hazan ◽  
J.P. Cabanie ◽  
J.J. Bernard
Keyword(s):  

1996 ◽  
Vol 32 (19) ◽  
pp. 1835 ◽  
Author(s):  
A.E. Kelly ◽  
I.F. Lealman ◽  
L.J. Rivers ◽  
S.D. Perrin ◽  
M. Silver

Materials ◽  
2021 ◽  
Vol 14 (5) ◽  
pp. 1282
Author(s):  
Victor Reshetnyak ◽  
Igor Pinkevych ◽  
Timothy Bunning ◽  
Dean Evans

This study theoretically investigated light reflection and transmission in a system composed of a thin metal layer (Ag) adjacent to a rugate filter (RF) having a harmonic refractive index profile. Narrow dips in reflectance and peaks in transmittance in the RF band gap were obtained due to the excitation of a Tamm plasmon polariton (TPP) at the Ag–RF interface. It is shown that the spectral position and magnitude of the TPP dips/peaks in the RF band gap depend on the harmonic profile parameters of the RF refractive index, the metal layer thickness, and the external medium refractive index. The obtained dependences for reflectance and transmittance allow selecting parameters of the system which can be optimized for various applications.


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