Test Method for Measuring Resistivity of Silicon Wafers Using a Spreading Resistance Probe

Mapping Intimacies ◽

10.1520/f0525-00a ◽

2000 ◽

Author(s):

Keyword(s):

Silicon Wafers ◽

Test Method ◽

Spreading Resistance

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Test Method for Measuring Resistivity of Silicon Wafers Using a Spreading Resistance Probe

10.1520/f0525-88r94e01 ◽

1994 ◽

Author(s):

Keyword(s):

Silicon Wafers ◽

Test Method ◽

Spreading Resistance

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Test Method for Measuring Resistivity of Silicon Wafers Using a Spreading Resistance Probe

10.1520/f0525-00 ◽

2000 ◽

Author(s):

Keyword(s):

Silicon Wafers ◽

Test Method ◽

Spreading Resistance

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Test Method for Measuring Resistivity of Silicon Wafers Using a Spreading Resistance Probe

10.1520/f0525 ◽

2003 ◽

Author(s):

Keyword(s):

Silicon Wafers ◽

Test Method ◽

Spreading Resistance

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Mapping Silicon Wafers by Spreading Resistance

Emerging Semiconductor Technology ◽

10.1520/stp25793s ◽

2008 ◽

pp. 586-586-12

Author(s):

RG Mazur

Keyword(s):

Silicon Wafers ◽

Spreading Resistance

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Test Method for Measuring Resistivity Profiles Perpendicular to the Surface of a Silicon Wafer Using a Spreading Resistance Probe

10.1520/f0672-01 ◽

2001 ◽

Author(s):

Keyword(s):

Silicon Wafer ◽

Test Method ◽

Spreading Resistance

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Test Method for Measuring Radial Resistivity Variation on Silicon Wafers

10.1520/f0081-95 ◽

1995 ◽

Author(s):

Keyword(s):

Silicon Wafers ◽

Test Method ◽

Resistivity Variation

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Test Method for Measuring Radial Resistivity Variation on Silicon Wafers

10.1520/f0081 ◽

2003 ◽

Author(s):

Keyword(s):

Silicon Wafers ◽

Test Method ◽

Resistivity Variation

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Test Method for Measuring Resistivity of Silicon Wafers With an In-Line Four-Point Probe

10.1520/f0084-99 ◽

1999 ◽

Author(s):

Keyword(s):

Silicon Wafers ◽

Test Method

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Test Method for Oxygen Precipitation Characteristics of Silicon Wafers by Measurement of Interstitial Oxygen Reduction

10.1520/f1239-94 ◽

1994 ◽

Author(s):

Keyword(s):

Oxygen Reduction ◽

Silicon Wafers ◽

Test Method ◽

Interstitial Oxygen ◽

Oxygen Precipitation ◽

Precipitation Characteristics

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Test Method for Determination of Radial Interstitial Oxygen Variation in Silicon Wafers

10.1520/f0951-96 ◽

1996 ◽

Author(s):

Keyword(s):

Silicon Wafers ◽

Test Method ◽

Interstitial Oxygen

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