Hybrid bulk micro-machining process suitable for roughness reduction in optical MEMS devices

2006 ◽  
Vol 9 (1/2) ◽  
pp. 144 ◽  
Author(s):  
Arvind Chandrasekaran ◽  
Muthukumaran Packirisamy ◽  
Ion Stiharu ◽  
Andre Delage
Keyword(s):  
Machining Process ◽  
Micro Machining ◽  
Mems Devices ◽  
Optical Mems

Challenges and Issues in the Design of Micro-Machined Antennas - A Review

2020 ◽  
Vol 13 ◽  
Author(s):  
Ashish Kumar ◽  
Amar Partap Singh Pharwaha
Keyword(s):  
Patch Antenna ◽  
Ground Plane ◽  
Substrate Material ◽  
Review Article ◽  
High Index ◽  
Performance Characteristics ◽  
Machining Process ◽  
Patch Antennas ◽  
Micro Machining ◽  
The Impact

Background: Patch antennas are composed of the substrate material with patch and ground plane on the both sides of the substrate. The dimensions and performance characteristics of the antenna are highly influenced by the choice of the appropriate substrate depending upon the value of their dielectric constant. Generally, low index substrate materials are used to design the patch antenna but there are also some of the applications, which require the implementation of patch antenna design on high index substrate like silicon and gallium arsenide. Objective: The objective of this article is to review the design of antennas developed on high index substrate and the problems associated with the use of these materials as substrate. Also, main challenges and solutions have been discussed to improve the performance characteristics while using the high index substrates. Method: The review article has divided into various sections including the solution of the problems associated with the high index substrates in the form of micro-machining process. Along with this, types of micro machining and their applications have discussed in detail. Results: This review article investigates the various patch antennas designed with micro-machining technology and also discusses the impact of micro-machining process on the performance parameters of the patch antennas designed on high index substrates. Conclusion: By using the micro-machining process, the performance of patch antenna improves drastically but fabrication and tolerances at such minute structures is very tedious task for the antenna designers.

Marathon für kleinen Bohrer

VDI-Z ◽  
2019 ◽  
Vol 161 (Special-II) ◽  
pp. 38-39
Keyword(s):  
Machining Process ◽  
Micro Machining

Damit die Firma Werner Rau hohen Qualitätsansprüchen gerecht werden kann, setzt der Geschäftsführer auf Werkzeuge von Fritz Hartmann Präzisionswerkzeuge – mit Erfolg: Bei der Bearbeitung mehrerer Druckplatten mit je 38 000 Bohrungen stellte ein 3 mm-Spiralbohrer mit MMP (Micro Machining Process)- Technologie von HAM seine Präzision seine Qualität vorbildlich unter Beweis.

scholarly journals Micro Machining Process Selection: An Integrated Theory

2016 ◽  
Vol 25 ◽  
pp. 862-868 ◽  
Author(s):  
Sandeep Kuriakose ◽  
Anil Varghese Mangalan ◽  
Babu Namboothiri ◽  
Amitava Ray
Keyword(s):  
Machining Process ◽  
Micro Machining ◽  
Process Selection ◽  
Integrated Theory

A Study of Abrasive Jet Micro-Grooving of Quartz Crystals

2010 ◽  
Vol 443 ◽  
pp. 645-651 ◽  
Author(s):  
Alireza Moridi ◽  
Jun Wang ◽  
Yasser M. Ali ◽  
Philip Mathew ◽  
Xiao Ping Li
Keyword(s):  
Predictive Models ◽  
Deep Understanding ◽  
Machining Process ◽  
Micro Machining ◽  
Machining Performance ◽  
Quartz Crystals ◽  
Abrasive Jet Machining ◽  
Model Predictions ◽  
Micro Grooving ◽  
Good Agreement

Owing to its various distinct advantages over the other machining technologies, abrasive jet machining has become a promising machining technology for brittle and hard-to-machine materials. An experimental study is presented on the micro-grooving of quartz crystals using an abrasive airjet. The effect of the various process parameters on the major machining performance measures are analysed to provide a deep understanding of this micro-machining process. Predictive models are then developed for quantitatively estimating the machining performance. The models are finally verified by an experiment. It shows that the model predictions are in good agreement with the experimental results under the corresponding conditions.

An Experimental Study of the Abrasive Water Jet Micro-Machining Process for Quartz Crystals

2012 ◽  
Vol 565 ◽  
pp. 339-344 ◽  
Author(s):  
H. Qi ◽  
J.M. Fan ◽  
Jun Wang
Keyword(s):  
Experimental Study ◽  
Removal Rate ◽  
Water Jet ◽  
Machining Process ◽  
Bottom Surface ◽  
Micro Machining ◽  
Abrasive Water Jet ◽  
Process Variables ◽  
Jet Impact ◽  
Micro Channels

An experimental study of the machining process for micro-channels on a brittle quartz crystal material by an abrasive slurry jet (ASJ) is presented. A statistical experiment design considering the major process variables is conducted, and the machined surface morphology and channelling performance are analysed to understand the micro-machining process. It is found that a good channel top edge appearance and bottom surface quality without wavy patterns can be achieved by employing relatively small particles at shallow jet impact angles. The major channel performance measures, i.e. material removal rate (MRR) and channel depth, are then discussed with respect to the process parameters. It shows that with a proper control of the process variables, the abrasive water jet (AWJ) technology can be used for the micro-machining of brittle materials with high quality and productivity.

Multi-Material Capability of Laser Induced Plasma Micromachining

2014 ◽  
Author(s):  
Ishan Saxena ◽  
Kornel Ehmann
Keyword(s):  
Laser Ablation ◽  
Metal Cutting ◽  
Medical Engineering ◽  
Machining Process ◽  
Micro Machining ◽  
Promising Alternative ◽  
Laser Induced Plasma ◽  
Direct Laser ◽  
Micro Features ◽  
Machining Characteristics

Presently surface micro-texturing has found many promising applications in the fields of tribology, bio-medical engineering, metal cutting, and other functional or topographical surfaces. Most of these applications are material-specific, which necessitates the need for a texturing and machining process that surpasses the limitations posed by a certain class of materials that are difficult to process by laser ablation, owing to their optical or other surface or bulk characteristics. Laser Induced Plasma Micromachining (LIPMM) has emerged as a promising alternative to direct laser ablation for micro-machining and micro-texturing, which offers superior machining characteristics while preserving the resolution, accuracy and tool-less nature of laser ablation. This study is aimed at understanding the capability of LIPMM process to address some of the issues faced by pulsed laser ablation in material processing. This paper experimentally demonstrates machining of optically transmissive, reflective and rough surface materials using LIPMM. Apart from this, the study includes machining of conventional metals (Nickel and Titanium) and polymer (Polyimide), to demonstrate higher obtainable depth and reduced heat affected distortion around micro-features machined by LIPMM, as compared to laser ablation.

On the Modeling of Friction in Micromachining Processes

2007 ◽  
Author(s):  
M. R. Lovell ◽  
P. H. Cohen ◽  
R. Shankar
Keyword(s):  
Friction Mechanisms ◽  
Machining Process ◽  
Micro Machining ◽  
Machining Processes ◽  
Macroscopic Theory ◽  
Contact Conditions ◽  
Macro Scale ◽  
Scale Models ◽  
Basic Understanding ◽  
Physical Phenomena

When machining miniaturized components, the contact conditions between the tool and workpiece exhibit very small contact areas that are on the order of 10−5 mm2. Under these conditions, extremely high contact stresses are generated and it is not clear whether macroscopic theories for the chip formation, cutting forces, and the friction mechanisms are applicable. For this reason, the present investigation has focused on creating a basic understanding of the frictional behavior in micro machining processes so that evaluations of standard macro-scale models could be performed. Specialized machining experiments were conducted on 70/30 brass materials using steel tools over a range of speeds, feeds, depths of cut and tool rake angles. At each operating condition studied, the friction coefficient and the shear factor, τk, were obtained. Based on the experimental results, it was determined that standard macroscopic theory for analyzing detailed friction mechanisms was insufficient in micro machining processes. An approach that utilized the shear factor, in contrast, was found to be better for decoupling the physical phenomena involved. Utilizing the shear factor as an analysis parameter, the parameters that significantly influence the friction in microscale machining process were ascertained and discussed.

System Design and Kinematics Simulation of Electrochemical Machining Set-Up for Micro-Holes

2007 ◽  
Author(s):  
Jishun Jiang ◽  
Zhiyong Li
Keyword(s):  
Control Method ◽  
Electrochemical Machining ◽  
Machining Process ◽  
Rectilinear Motion ◽  
Micro Machining ◽  
Technical Requirements ◽  
Kinematics Simulation ◽  
Wide Range ◽  
Micro Holes ◽  
Set Up

Electrochemical micro-machining (EMM) appears to be very promising as a future micro-machining technique, since in many areas of applications, it offers many advantages, which include excellent machining precision and control, high machining rate, perfect surface quality and a wide range of materials that can be machined, regardless of their strength and toughness. At present, electrochemical micro-machining has been applied in the production of some metal workpieces, such as micro-holes, micro-slots and complex 3D surfaces. In this paper, A new electrochemical micro-machining set-up for machining metal micro-holes has been developed. Double level mechanical structure has been applied as the main structure style, which has the advantage of excellent structure rigidity, compact framework dimension as well as perfect maneuverability and maintainability. The control system based on PLC control method has also employed to realize different motion styles for rotating axis, such as uniform velocity rectilinear motion, varying velocity rectilinear motion and cycle rectilinear motion and so on. In order to verify the reliability of this EMM set-up, some test works including static measurement, assembling interferences checking and kinematics simulation have been done. The simulation results demonstrate that the developed EMM set-up for manufacturing metal micro-holes is qualified and can satisfy the technical requirements of electrochemical micro-machining process.

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