scholarly journals Plasma Generation in Organic Solvent for Amorphous Carbon Film Deposition

2010 ◽  
Vol 35 (3) ◽  
pp. 567-570 ◽  
Author(s):  
Masanori Shinohara ◽  
Shuai Zhang ◽  
Kenji Kotani ◽  
Kazuhiko Akaki ◽  
Yoshinobu Matsuda ◽  
...  
Keyword(s):  
Organic Solvent ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
Film Deposition ◽  
Amorphous Carbon Film ◽  
Plasma Generation

scholarly journals Substrate Bias Effects on Amorphous Carbon Film Deposition Process during Acetylene Plasma, Investigated with Infrared Spectroscopy

2010 ◽  
Vol 35 (3) ◽  
pp. 563-566 ◽  
Author(s):  
Masanori Shinohara ◽  
Hiroki Kawazoe ◽  
Taka-aki Kawakami ◽  
Takanori Inayoshi ◽  
Yoshinobu Matsuda ◽  
...  
Keyword(s):  
Infrared Spectroscopy ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
Deposition Process ◽  
Film Deposition ◽  
Substrate Bias ◽  
Amorphous Carbon Film

Characteristics of magnetically driven shunting arc plasma for amorphous carbon film deposition

2006 ◽  
Vol 506-507 ◽  
pp. 150-154 ◽  
Author(s):  
K. Takaki ◽  
O. Kumagai ◽  
R. Hasegawa ◽  
S. Mukaigawa ◽  
T. Fujiwara ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Film ◽  
Film Deposition ◽  
Arc Plasma ◽  
Amorphous Carbon Film

Amorphous carbon film deposition by laser induced C60 fragmentation

1997 ◽  
Vol 109-110 ◽  
pp. 457-461 ◽  
Author(s):  
P. Heszler ◽  
J.O. Carlsson ◽  
J. Lu
Keyword(s):  
Amorphous Carbon ◽  
Carbon Film ◽  
Film Deposition ◽  
Amorphous Carbon Film

scholarly journals Infrared Spectroscopy of Amorphous Carbon Film Deposition Process using Acetylene Plasma

Hyomen Kagaku ◽  
2010 ◽  
Vol 31 (8) ◽  
pp. 400-404
Author(s):  
Masanori SHINOHARA ◽  
Hiroki KAWAZOE ◽  
Takanori INAYOSHI ◽  
Taka-aki KAWAKAMI ◽  
Kojiro HARA ◽  
...  
Keyword(s):  
Infrared Spectroscopy ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
Deposition Process ◽  
Film Deposition ◽  
Amorphous Carbon Film
Sign in / Sign up

Export Citation Format

Share Document