High-Rate Deposition of High-Pure Silicon Thin Films for PV-Absorber Layers by Crucible-Free Electron Beam Physical Vapor Deposition

2019 ◽  
Author(s):  
Stefan Saager ◽  
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Vapor Deposition ◽  
Free Electron ◽  
Physical Vapor Deposition ◽  
High Rate ◽  
Pure Silicon ◽  
Silicon Thin Films

High rate hot-wire chemical vapor deposition of silicon thin films using a stable TaC covered graphite filament

2011 ◽  
Vol 519 (14) ◽  
pp. 4585-4588 ◽  
Author(s):  
Ina T. Martin ◽  
Charles W. Teplin ◽  
Paul Stradins ◽  
Marc Landry ◽  
Maxim Shub ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
High Rate ◽  
Hot Wire ◽  
Silicon Thin Films

Physical vapor deposition of molybdenum and silicon thin films

1994 ◽  
Vol 68-69 ◽  
pp. 45-50 ◽  
Author(s):  
S. Govindarajan ◽  
J.J. Moore ◽  
B. Mishra ◽  
D.L. Olson
Keyword(s):  
Thin Films ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Silicon Thin Films
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