Effect of Peak Current Density on Inner-wall Deposition of Ti Films by High-power Impulse Magnetron Sputtering
Keyword(s):
2019 ◽
Vol 33
(01n03)
◽
pp. 1940016
Keyword(s):
2004 ◽
Vol 11
(04n05)
◽
pp. 433-442
◽
2011 ◽
Vol 336
(1)
◽
pp. 24-28
◽
Keyword(s):
Keyword(s):