Depth Profiling of Boron in Silicon by High-resolution Medium Energy Elastic Recoil Detection Analysis

Kaoru Sasakawa; Kaoru Nakajima; Motofumi Suzuki; Kenji Kimura

doi:10.1380/ejssnt.2012.655

Depth Profiling of Boron in Silicon by High-resolution Medium Energy Elastic Recoil Detection Analysis

e-Journal of Surface Science and Nanotechnology ◽

10.1380/ejssnt.2012.655 ◽

2012 ◽

Vol 10 (0) ◽

pp. 655-660 ◽

Cited By ~ 1

Author(s):

Kaoru Sasakawa ◽

Kaoru Nakajima ◽

Motofumi Suzuki ◽

Kenji Kimura

Keyword(s):

High Resolution ◽

Depth Profiling ◽

Medium Energy ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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High resolution elastic recoil detection analysis of polystyrene depth profiles using carbon ions

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(98)00344-9 ◽

1998 ◽

Vol 143 (3) ◽

pp. 371-380 ◽

Cited By ~ 9

Author(s):

Mark Geoghegan ◽

François Abel

Keyword(s):

High Resolution ◽

Carbon Ions ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Depth Profiles ◽

Detection Analysis

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Geometric considerations relevant to hydrogen depth profiling by reflection elastic recoil detection analysis

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(01)00634-6 ◽

2001 ◽

Vol 183 (3-4) ◽

pp. 391-400 ◽

Cited By ~ 13

Author(s):

R.D Verda ◽

J.R Tesmer ◽

C.J Maggiore ◽

M Nastasi ◽

R.W Bower

Keyword(s):

Depth Profiling ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Hydrogen and deuterium depth profiling by elastic recoil detection analysis

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(88)90315-1 ◽

1988 ◽

Vol 35 (3-4) ◽

pp. 478-483 ◽

Cited By ~ 23

Author(s):

R. Pretorius ◽

M. Peisach ◽

J.W. Mayer

Keyword(s):

Depth Profiling ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Characterization of subsurface hydrogen in diamond films by high-resolution elastic recoil detection analysis

Physica B Condensed Matter ◽

10.1016/j.physb.2005.12.079 ◽

2006 ◽

Vol 376-377 ◽

pp. 307-310 ◽

Cited By ~ 4

Author(s):

Kazushi Hayashi ◽

Nobuyuki Kawakami ◽

Chikara Ichihara ◽

Koji Kobashi

Keyword(s):

High Resolution ◽

Diamond Films ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Quantitative hydrogen analysis through time of flight-elastic recoil detection analysis using medium energy ions

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2018.11.005 ◽

2019 ◽

Vol 450 ◽

pp. 310-314

Author(s):

Kyungsu Park ◽

Jwa Soon Kim ◽

Sung Yup An ◽

Kwang Hwan Jung ◽

Soobang Kim ◽

...

Keyword(s):

Time Of Flight ◽

Medium Energy ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis ◽

Hydrogen Analysis

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Implementation of heavy-ion elastic recoil detection analysis at JANNUS-Saclay for quantitative helium depth profiling

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2015.07.040 ◽

2015 ◽

Vol 360 ◽

pp. 9-15 ◽

Cited By ~ 3

Author(s):

T. Loussouarn ◽

L. Beck ◽

P. Trocellier ◽

D. Brimbal ◽

F. Leprêtre ◽

...

Keyword(s):

Depth Profiling ◽

Heavy Ion ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Erratum to “Depth profiling of hydrogen in crystalline silicon using elastic recoil detection analysis” [Nucl. Instr. and Meth. B 183 (2001) 401–412]

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(01)00975-2 ◽

2001 ◽

Vol 184 (4) ◽

pp. 656

Author(s):

R.D Verda ◽

C.J Maggiore ◽

J.R Tesmer ◽

A Misra ◽

T Hoechbauer ◽

...

Keyword(s):

Crystalline Silicon ◽

Depth Profiling ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Nucl Instr ◽

Detection Analysis

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Quantification of outermost OH group on silica glass surface by high-resolution elastic recoil detection analysis

Journal of Non-Crystalline Solids ◽

10.1016/j.jnoncrysol.2018.07.031 ◽

2018 ◽

Vol 499 ◽

pp. 408-411 ◽

Cited By ~ 2

Author(s):

Yuichi Yamamoto ◽

Koya Sato ◽

Kaoru Nakajima ◽

Kenji Kimura

Keyword(s):

High Resolution ◽

Silica Glass ◽

Glass Surface ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Erratum to “Geometric considerations relevant to hydrogen depth profiling by reflection elastic recoil detection analysis” [Nucl. Instr. and Meth. B 183 (2001) 391–400]

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(01)00976-4 ◽

2001 ◽

Vol 184 (4) ◽

pp. 655

Author(s):

R.D Verda ◽

J.R Tesmer ◽

C.J Maggiore ◽

M Nastasi ◽

R.W Bower

Keyword(s):

Depth Profiling ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Nucl Instr ◽

Detection Analysis

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Depth profile analysis of helium in silicon with high-resolution elastic recoil detection analysis

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3425636 ◽

2010 ◽

Vol 28 (3) ◽

pp. 554-557 ◽

Cited By ~ 1

Author(s):

Mitsuhiro Tomita ◽

Haruko Akutsu ◽

Yasunori Oshima ◽

Nobutaka Sato ◽

Shoichi Mure ◽

...

Keyword(s):

High Resolution ◽

Depth Profile ◽

Profile Analysis ◽

Elastic Recoil ◽

Depth Profile Analysis ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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