Virtual-source theory of unstable resonator modes

1981 ◽  
Vol 6 (10) ◽  
pp. 487 ◽  
Author(s):  
W. H. Southwell
2017 ◽  
Vol 64 (20) ◽  
pp. 2185-2194
Author(s):  
G. H. C. New

2002 ◽  
Vol 208 (4-6) ◽  
pp. 377-380 ◽  
Author(s):  
M.A Yates ◽  
G.H.C New

1990 ◽  
Vol 29 (30) ◽  
pp. 4462 ◽  
Author(s):  
Y. Q. Li ◽  
C. C. Sung

1987 ◽  
pp. 165-387 ◽  
Author(s):  
Kurt Edmund Oughstun

2012 ◽  
Vol 59 (15) ◽  
pp. 1363-1370 ◽  
Author(s):  
G.H.C. New ◽  
Z. Derrar Kaddour

Author(s):  
T. Miyokawa ◽  
S. Norioka ◽  
S. Goto

Field emission SEMs (FE-SEMs) are becoming popular due to their high resolution needs. In the field of semiconductor product, it is demanded to use the low accelerating voltage FE-SEM to avoid the electron irradiation damage and the electron charging up on samples. However the accelerating voltage of usual SEM with FE-gun is limited until 1 kV, which is not enough small for the present demands, because the virtual source goes far from the tip in lower accelerating voltages. This virtual source position depends on the shape of the electrostatic lens. So, we investigated several types of electrostatic lenses to be applicable to the lower accelerating voltage. In the result, it is found a field emission gun with a conical anode is effectively applied for a wide range of low accelerating voltages.A field emission gun usually consists of a field emission tip (cold cathode) and the Butler type electrostatic lens.


Sign in / Sign up

Export Citation Format

Share Document