Unstable-resonator-mode derivation using virtual-source theory

1986 ◽  
Vol 3 (11) ◽  
pp. 1885 ◽  
Author(s):  
W. H. Southwell
1977 ◽  
Vol 13 (9) ◽  
pp. 842-842
Author(s):  
D. Northam ◽  
M. Mack ◽  
I. Itzkan

Author(s):  
RICHARD F. HORTON ◽  
LEONARD LITZENBERGER ◽  
DANIEL TRAINOR ◽  
RALPH BERGGREN ◽  
DAVID KORFF

1985 ◽  
Vol 58 (11) ◽  
pp. 3987-3990 ◽  
Author(s):  
Shingo Izawa ◽  
Akira Suda ◽  
Minoru Obara

1978 ◽  
Vol 17 (6) ◽  
pp. 931 ◽  
Author(s):  
D. B. Northam ◽  
M. E. Mack ◽  
I. Itzkan

Author(s):  
T. Miyokawa ◽  
S. Norioka ◽  
S. Goto

Field emission SEMs (FE-SEMs) are becoming popular due to their high resolution needs. In the field of semiconductor product, it is demanded to use the low accelerating voltage FE-SEM to avoid the electron irradiation damage and the electron charging up on samples. However the accelerating voltage of usual SEM with FE-gun is limited until 1 kV, which is not enough small for the present demands, because the virtual source goes far from the tip in lower accelerating voltages. This virtual source position depends on the shape of the electrostatic lens. So, we investigated several types of electrostatic lenses to be applicable to the lower accelerating voltage. In the result, it is found a field emission gun with a conical anode is effectively applied for a wide range of low accelerating voltages.A field emission gun usually consists of a field emission tip (cold cathode) and the Butler type electrostatic lens.


1987 ◽  
Vol 134 (1) ◽  
pp. 69 ◽  
Author(s):  
R.J. Lang ◽  
M. Mittelstein ◽  
A. Yariv ◽  
J. Salzman

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