Diffraction symmetry of binary Fourier elements with feature sizes on the order of the illumination wavelength and effects of fabrication errors
Keyword(s):
2006 ◽
Vol 6
(5)
◽
pp. 10713-10731
◽
2018 ◽
Vol 9
◽
pp. 216-223
◽
Keyword(s):
Keyword(s):
2012 ◽
Vol 24
(9)
◽
pp. 2079-2084
◽