scholarly journals High-performance and linear thin-film lithium niobate Mach–Zehnder modulators on silicon up to 50  GHz

2016 ◽  
Vol 41 (24) ◽  
pp. 5700 ◽  
Author(s):  
Ashutosh Rao ◽  
Aniket Patil ◽  
Payam Rabiei ◽  
Amirmahdi Honardoost ◽  
Richard DeSalvo ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
High Performance

scholarly journals In-Situ Process and Simulation of High-Performance Piezoelectric-on-Silicon Substrate for SAW Sensor

2021 ◽  
Vol 8 ◽  
Author(s):  
Rui Ma ◽  
Weiguo Liu ◽  
Xueping Sun ◽  
Shun Zhou
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
High Performance ◽  
Electromechanical Coupling ◽  
Substrate Material ◽  
Electromechanical Coupling Coefficient ◽  
Bonding Layer ◽  
Saw Sensor ◽  
Rayleigh Mode

This paper studied the manufacturing process of Piezoelectric-on-Silicon (POS) substrate which integrates 128° Y–X Lithium niobate thin film and silicon wafer using Smart-Cut technology. The blistering and exfoliation processes of the He as-implanted LN crystal under different annealing temperatures are observed by the in-situ method. Unlike the conventional polishing process, the stripping mechanism of the Lithium niobate thin film is changed by controlling annealing temperature, which can improve the surface morphology of the peeling lithium niobate thin film. We prepared the 128° Y–X POS substrate with high single-crystal Lithium niobate thin film and surface roughness of 3.91 nm through Benzocyclobutene bonding. After simulating the surface acoustic wave (SAW) characteristics of the POS substrate, the results demonstrate that the Benzocyclobutene layer not only performs as a bonding layer but also can couple more vibrations into the LN thin film. The electromechanical coupling coefficient of the POS substrate is up to 7.59% in the Rayleigh mode when hLN/λ is 0.3 and hBCB/λ is 0.1. Therefore, as a high-performance substrate material, the POS substrate has proved to be an efficient method to miniaturize and integrate the SAW sensor.

scholarly journals High-performance coherent optical modulators based on thin-film lithium niobate platform

2020 ◽  
Vol 11 (1) ◽  
Author(s):  
Mengyue Xu ◽  
Mingbo He ◽  
Hongguang Zhang ◽  
Jian Jian ◽  
Ying Pan ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
High Performance ◽  
Optical Modulators

scholarly journals Design and fabrication of high-performance multimode interferometer in lithium niobate thin film

2021 ◽  
Author(s):  
Guanyu Chen ◽  
Jun Da Ng ◽  
Hong-Lin Lin ◽  
Gong Zhang ◽  
Xiao Gong ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
High Performance

scholarly journals Bidirectional interconversion of microwave and light with thin-film lithium niobate

2021 ◽  
Author(s):  
Yuntao Xu ◽  
Ayed Sayem ◽  
Linran Fan ◽  
Chang-Ling Zou ◽  
Sihao Wang ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
Conversion Efficiency ◽  
High Performance ◽  
Photorefractive Effect ◽  
Optical Cavity ◽  
Long Distance ◽  
Superconducting Circuits ◽  
Network Applications ◽  
Electro Optic

Abstract Superconducting cavity electro-optics presents a promising route to coherently convert microwave and optical photons and distribute quantum entanglement between superconducting circuits over long-distance. Strong Pockels nonlinearity and high-performance optical cavity are the prerequisites for high conversion efficiency. Thin-film lithium niobate (TFLN) offers these desired characteristics. Despite significant recent progresses, only unidirectional conversion with efficiencies orders of magnitude lower than expected has been realized. In this article, we demonstrate the first bidirectional electro-optic conversion in TFLN-superconductor hybrid system, with conversion efficiency improved by more than three orders of magnitude. Our new air-clad device architecture boosts the sustainable intracavity pump power at cryogenic temperatures by suppressing the prominent photorefractive effect that limits cryogenic performance of TFLN, and reaches an efficiency of 1.02% (internal efficiency of 15.2%). This work firmly establishes the TFLN-superconductor hybrid EO system as a highly competitive transduction platform for future quantum network applications.

High-Performance Integrated Photonics in Thin Film Lithium Niobate Platform

2019 ◽  
Author(s):  
Meisam Bahadori ◽  
Arunita Kar ◽  
Yansong Yang ◽  
Ali Lavasani ◽  
Lynford Goddard ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
High Performance ◽  
Integrated Photonics

scholarly journals High-performance racetrack resonator in silicon nitride - thin film lithium niobate hybrid platform

2019 ◽  
Vol 27 (21) ◽  
pp. 30741 ◽  
Author(s):  
Abu Naim R. Ahmed ◽  
Shouyuan Shi ◽  
Andrew J. Mercante ◽  
Dennis W. Prather
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Lithium Niobate ◽  
High Performance ◽  
Hybrid Platform ◽  
Racetrack Resonator

scholarly journals High performance fully etched isotropic microring resonators in thin-film lithium niobate on insulator platform

2019 ◽  
Vol 27 (15) ◽  
pp. 22025 ◽  
Author(s):  
Meisam Bahadori ◽  
Yansong Yang ◽  
Lynford L. Goddard ◽  
Songbin Gong
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
High Performance ◽  
Microring Resonators

scholarly journals Bidirectional interconversion of microwave and light with thin-film lithium niobate

2021 ◽  
Vol 12 (1) ◽  
Author(s):  
Yuntao Xu ◽  
Ayed Al Sayem ◽  
Linran Fan ◽  
Chang-Ling Zou ◽  
Sihao Wang ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
Conversion Efficiency ◽  
High Performance ◽  
Photorefractive Effect ◽  
Optical Cavity ◽  
Long Distance ◽  
Superconducting Circuits ◽  
Network Applications ◽  
Electro Optic

AbstractSuperconducting cavity electro-optics presents a promising route to coherently convert microwave and optical photons and distribute quantum entanglement between superconducting circuits over long-distance. Strong Pockels nonlinearity and high-performance optical cavity are the prerequisites for high conversion efficiency. Thin-film lithium niobate (TFLN) offers these desired characteristics. Despite significant recent progresses, only unidirectional conversion with efficiencies on the order of 10−5 has been realized. In this article, we demonstrate the bidirectional electro-optic conversion in TFLN-superconductor hybrid system, with conversion efficiency improved by more than three orders of magnitude. Our air-clad device architecture boosts the sustainable intracavity pump power at cryogenic temperatures by suppressing the prominent photorefractive effect that limits cryogenic performance of TFLN, and reaches an efficiency of 1.02% (internal efficiency of 15.2%). This work firmly establishes the TFLN-superconductor hybrid EO system as a highly competitive transduction platform for future quantum network applications.

High-resolution scanning electron microscopy of thin-film magnetic media of magnetic recording disk

1992 ◽  
Vol 50 (2) ◽  
pp. 1334-1335
Author(s):  
K. Ogura ◽  
H. Nishioka ◽  
N. Ikeo ◽  
T. Kanazawa ◽  
J. Teshima
Keyword(s):  
Thin Film ◽  
Fine Structure ◽  
High Resolution ◽  
Magnetic Recording ◽  
High Performance ◽  
Magnetic Hysteresis ◽  
Grain Structure ◽  
Magnetic Media ◽  
Cross Sectional ◽  
Resolution Observation

Structural appraisal of thin film magnetic media is very important because their magnetic characters such as magnetic hysteresis and recording behaviors are drastically altered by the grain structure of the film. However, in general, the surface of thin film magnetic media of magnetic recording disk which is process completed is protected by several-nm thick sputtered carbon. Therefore, high-resolution observation of a cross-sectional plane of a disk is strongly required to see the fine structure of the thin film magnetic media. Additionally, observation of the top protection film is also very important in this field.Recently, several different process-completed magnetic disks were examined with a UHR-SEM, the JEOL JSM 890, which consisted of a field emission gun and a high-performance immerse lens. The disks were cut into approximately 10-mm squares, the bottom of these pieces were carved into more than half of the total thickness of the disks, and they were bent. There were many cracks on the bent disks. When these disks were observed with the UHR-SEM, it was very difficult to observe the fine structure of thin film magnetic media which appeared on the cracks, because of a very heavy contamination on the observing area.

The Structure and Properties of MoSi2 Thin Film in Mos Process

1980 ◽  
Vol 38 ◽  
pp. 326-327
Author(s):  
C.K. Wu ◽  
P. Chang ◽  
N. Godinho
Keyword(s):  
Thin Film ◽  
Integrated Circuits ◽  
High Performance ◽  
Large Scale ◽  
Process Development ◽  
Structure And Properties ◽  
Metal Silicides ◽  
High Oxidation ◽  
Important Approach ◽  
High Oxidation Resistance

Recently, the use of refractory metal silicides as low resistivity, high temperature and high oxidation resistance gate materials in large scale integrated circuits (LSI) has become an important approach in advanced MOS process development (1). This research is a systematic study on the structure and properties of molybdenum silicide thin film and its applicability to high performance LSI fabrication.

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