scholarly journals High-performance racetrack resonator in silicon nitride - thin film lithium niobate hybrid platform

2019 ◽  
Vol 27 (21) ◽  
pp. 30741 ◽  
Author(s):  
Abu Naim R. Ahmed ◽  
Shouyuan Shi ◽  
Andrew J. Mercante ◽  
Dennis W. Prather
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Lithium Niobate ◽  
High Performance ◽  
Hybrid Platform ◽  
Racetrack Resonator

Subvolt electro-optical modulator on thin-film lithium niobate and silicon nitride hybrid platform

2020 ◽  
Vol 45 (5) ◽  
pp. 1112 ◽  
Author(s):  
Abu Naim R. Ahmed ◽  
Sean Nelan ◽  
Shouyuan Shi ◽  
Peng Yao ◽  
Andrew Mercante ◽  
...  
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Lithium Niobate ◽  
Optical Modulator ◽  
Electro Optical Modulator ◽  
Hybrid Platform

TE/TM-pass polarizers based on lateral leakage in a thin film lithium niobate–silicon nitride hybrid platform

2020 ◽  
Vol 45 (17) ◽  
pp. 4915 ◽  
Author(s):  
Yang Liu ◽  
Xingrui Huang ◽  
Zezheng Li ◽  
Yingxin Kuang ◽  
Huan Guan ◽  
...  
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Lithium Niobate ◽  
Hybrid Platform

TE/TM-pass polarizers based on lateral leakage in a thin film lithium niobate–silicon nitride hybrid platform: publisher’s note

2020 ◽  
Vol 45 (18) ◽  
pp. 5160
Author(s):  
Yang Liu ◽  
Xingrui Huang ◽  
Zezheng Li ◽  
Yingxin Kuang ◽  
Huan Guan ◽  
...  
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Lithium Niobate ◽  
Hybrid Platform

scholarly journals In-Situ Process and Simulation of High-Performance Piezoelectric-on-Silicon Substrate for SAW Sensor

2021 ◽  
Vol 8 ◽  
Author(s):  
Rui Ma ◽  
Weiguo Liu ◽  
Xueping Sun ◽  
Shun Zhou
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
High Performance ◽  
Electromechanical Coupling ◽  
Substrate Material ◽  
Electromechanical Coupling Coefficient ◽  
Bonding Layer ◽  
Saw Sensor ◽  
Rayleigh Mode

This paper studied the manufacturing process of Piezoelectric-on-Silicon (POS) substrate which integrates 128° Y–X Lithium niobate thin film and silicon wafer using Smart-Cut technology. The blistering and exfoliation processes of the He as-implanted LN crystal under different annealing temperatures are observed by the in-situ method. Unlike the conventional polishing process, the stripping mechanism of the Lithium niobate thin film is changed by controlling annealing temperature, which can improve the surface morphology of the peeling lithium niobate thin film. We prepared the 128° Y–X POS substrate with high single-crystal Lithium niobate thin film and surface roughness of 3.91 nm through Benzocyclobutene bonding. After simulating the surface acoustic wave (SAW) characteristics of the POS substrate, the results demonstrate that the Benzocyclobutene layer not only performs as a bonding layer but also can couple more vibrations into the LN thin film. The electromechanical coupling coefficient of the POS substrate is up to 7.59% in the Rayleigh mode when hLN/λ is 0.3 and hBCB/λ is 0.1. Therefore, as a high-performance substrate material, the POS substrate has proved to be an efficient method to miniaturize and integrate the SAW sensor.

C-band four-channel CWDM (de-)multiplexers on a thin film lithium niobate–silicon rich nitride hybrid platform

2021 ◽  
Vol 46 (19) ◽  
pp. 4726
Author(s):  
Yang Liu ◽  
Xingrui Huang ◽  
Huan Guan ◽  
Zhiguo Yu ◽  
Qingquan Wei ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
Hybrid Platform

scholarly journals High-performance coherent optical modulators based on thin-film lithium niobate platform

2020 ◽  
Vol 11 (1) ◽  
Author(s):  
Mengyue Xu ◽  
Mingbo He ◽  
Hongguang Zhang ◽  
Jian Jian ◽  
Ying Pan ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
High Performance ◽  
Optical Modulators

scholarly journals Design and fabrication of high-performance multimode interferometer in lithium niobate thin film

2021 ◽  
Author(s):  
Guanyu Chen ◽  
Jun Da Ng ◽  
Hong-Lin Lin ◽  
Gong Zhang ◽  
Xiao Gong ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
High Performance

Low-loss Thin Film Lithium Niobate Bonded on Silicon Nitride Waveguides

2020 ◽  
Author(s):  
Siddhartha Ghosh ◽  
Siva Yegnanarayanan ◽  
Matthew Ricci ◽  
Dave Kharas ◽  
Paul Juodawlkis
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Lithium Niobate ◽  
Low Loss
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