Tomographic reconstruction in soft x-ray microscopy using focus-stack back-projection

2015 ◽  
Vol 40 (10) ◽  
pp. 2201 ◽  
Author(s):  
Mårten Selin ◽  
Emelie Fogelqvist ◽  
Stephan Werner ◽  
Hans M. Hertz
Keyword(s):  
Tomographic Reconstruction ◽  
Back Projection ◽  
X Ray

X-Ray Nanotomography (XRMT) Tool for Non-Destructive High-Resolution Imaging of ICs

2001 ◽  
Author(s):  
Wenbing Yun ◽  
Steve Wang ◽  
David Scott ◽  
Kenneth W. Nill ◽  
Waleed S. Haddad
Keyword(s):  
High Resolution ◽  
Process Development ◽  
3D Visualization ◽  
Tomographic Reconstruction ◽  
Reconstruction Algorithms ◽  
X Ray ◽  
Visualization Software ◽  
Volumetric Reconstruction ◽  
Resolution Imaging ◽  
Non Destructive

Abstract A high-resolution table-sized x-ray nanotomography (XRMT) tool has been constructed that shows the promise of nondestructively imaging the internal structure of a full IC stack with a spatial resolution better than 100 nm. Such a tool can be used to detect, localize, and characterize buried defects in the IC. By collecting a set of X-ray projections through the full IC (which may include tens of micrometers of silicon substrate and several layers of Cu interconnects) and applying tomographic reconstruction algorithms to these projections, a 3D volumetric reconstruction can be obtained, and analyzed for defects using 3D visualization software. XRMT is a powerful technique that will find use in failure analysis and IC process development, and may facilitate or supplant investigations using SEM, TEM, and FIB tools, which generally require destructive sample preparation and a vacuum environment.

scholarly journals Doppler Tomography in 2D and 3D of the X-ray Binary Cyg X-1 for June 2007

2011 ◽  
Vol 7 (S282) ◽  
pp. 201-202 ◽  
Author(s):  
O. I. Sharova ◽  
M. I. Agafonov ◽  
E. A. Karitskaya ◽  
N. G. Bochkarev ◽  
S. V. Zharikov ◽  
...  
Keyword(s):  
Binary System ◽  
Spectral Data ◽  
Inclination Angle ◽  
Tomographic Reconstruction ◽  
Orbital Plane ◽  
National Observatory ◽  
Doppler Tomography ◽  
X Ray ◽  
2D And 3D ◽  
First Time

AbstractThe 2D and 3D Doppler tomograms of X-ray binary system Cyg X-1 (V1357 Cyg) were reconstructed from spectral data for the line HeII 4686Å obtained with 2-m telescope of the Peak Terskol Observatory (Russia) and 2.1-m telescope of the Mexican National Observatory in June, 2007. Information about gas motions outside the orbital plane, using all of the three velocity components Vx, Vy, Vz, was obtained for the first time. The tomographic reconstruction was carried out for the system inclination angle of 45°. The equal resolution (50 × 50 × 50 km/s) is realized in this case, in the orbital plane (Vx, Vy) and also in the perpendicular direction Vz. The checkout tomograms were realized also for the inclination angle of 40° because of the angle uncertainty. Two versions of the result showed no qualitative discrepancy. Details of the structures revealed by the 3D Doppler tomogram were analyzed.

scholarly journals Three-dimensional imaging of hold baggage for airport security

2014 ◽  
Vol XL-5 ◽  
pp. 331-336
Author(s):  
S. Kolokytha ◽  
R. Speller ◽  
S. Robson
Keyword(s):  
3D Imaging ◽  
Imaging System ◽  
Tomographic Reconstruction ◽  
Three Dimensional ◽  
Handling Time ◽  
Cost Effective ◽  
Airport Security ◽  
X Ray ◽  
Common System ◽  
Close Range

This study describes a cost-effective check-in baggage screening system, based on "on-belt tomosynthesis" (ObT) and close-range photogrammetry, that is designed to address the limitations of the most common system used, conventional projection radiography. The latter's limitations can lead to loss of information and an increase in baggage handling time, as baggage is manually searched or screened with more advanced systems. This project proposes a system that overcomes such limitations creating a cost-effective automated pseudo-3D imaging system, by combining x-ray and optical imaging to form digital tomograms. Tomographic reconstruction requires a knowledge of the change in geometry between multiple x-ray views of a common object. This is uniquely achieved using a close range photogrammetric system based on a small network of web-cameras. This paper presents the recent developments of the ObT system and describes recent findings of the photogrammetric system implementation. Based on these positive results, future work on the advancement of the ObT system as a cost-effective pseudo-3D imaging of hold baggage for airport security is proposed.

Influence of the X-Ray Spectrum on the Tomographic Reconstruction of Porous Ceramic Membranes

2021 ◽  
Vol 66 (6) ◽  
pp. 1100-1108
Author(s):  
M. V. Grigoriev ◽  
Yu. S. Krivonosov ◽  
A. V. Buzmakov ◽  
M. V. Chukalina ◽  
V. E. Asadchikov ◽  
...  
Keyword(s):  
Porous Ceramic ◽  
Tomographic Reconstruction ◽  
Ceramic Membranes ◽  
X Ray

Recent Development of Cone-Beam X-Ray Microtomography at Sunyab

1997 ◽  
Vol 3 (S2) ◽  
pp. 1125-1126
Author(s):  
S.J. Pan ◽  
A. Shih ◽  
W.S. Liou ◽  
M.S. Park ◽  
G. Wang ◽  
...  
Keyword(s):  
Dynamic Range ◽  
Imaging System ◽  
Tomographic Reconstruction ◽  
Ccd Camera ◽  
Test Sample ◽  
Glass Beads ◽  
Cone Beam ◽  
Projection Data ◽  
X Ray ◽  
Cooled Ccd

An experimental X-ray cone-beam microtomographic imaging system utilizing a generalized Feldkamp reconstruction algorithm has been developed in our laboratory. This microtomographic imaging system consists of a conventional dental X-ray source (Aztech 65, Boulder, CO), a sample position and rotation stage, an X-ray scintillation phosphor screen, and a high resolution slow scan cooled CCD camera (Kodak KAF 1400). A generalized Feldkamp cone-beam algorithm was used to perform tomographic reconstruction from cone-beam projection data. This algorithm was developed for various hardware configuration to perform reconstruction of spherical, rod-shaped and plate-like specimen.A test sample consists of 8 glass beads (approx. 800μm in diameter) dispersed in an epoxy-filled #0 gelatin capsule. One hundred X-ray projection images were captured equal angularly (at 3.6 degree spacing) by the cooled CCD camera at a of 1317×967 (17×17mm2) pixels with 12-bit dynamic range. Figure 1 shows a 3D isosurface rendering of the test sample. The eight glass beads and trapped air bubbles (arrows) in the epoxy resin (e) are clearly visible.

Three-dimensional tomography using a soft X-ray holographic microscope and CCD camera

1998 ◽  
Vol 5 (3) ◽  
pp. 1088-1089 ◽  
Author(s):  
Norio Watanabe ◽  
Sadao Aoki
Keyword(s):  
Tungsten Wire ◽  
Three Dimensional ◽  
Numerical Aperture ◽  
Ccd Camera ◽  
Depth Resolution ◽  
Projection Data ◽  
Back Projection ◽  
X Ray ◽  
Dimensional Reconstruction ◽  
Transverse Resolution

The depth resolution of a soft X-ray hologram is much worse than its transverse resolution because a single soft X-ray hologram has a small numerical aperture. To obtain a three-dimensional image, in-line holograms of a specimen were recorded from various directions and reconstructed to obtain two-dimensional projection data. Then, a three-dimensional reconstruction was performed by back-projection of these reconstructed holograms. Three-dimensional images of a tungsten wire of diameter 10 µm and a fossil of a diatom were obtained.

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