scholarly journals Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities

2011 ◽  
Vol 36 (3) ◽  
pp. 421 ◽  
Author(s):  
Mughees Khan ◽  
Thomas Babinec ◽  
Murray W. McCutcheon ◽  
Parag Deotare ◽  
Marko Lončar
Keyword(s):  
Silicon Nitride ◽  
Quality Factor ◽  
High Quality Factor ◽  
High Quality ◽  
Fabrication And Characterization ◽  
Nanobeam Cavities

Characterization of a Non-Interdigitated Comb Drive

2018 ◽  
Author(s):  
Mary Gopanchuk ◽  
Mohamed Arabi ◽  
N. Nelson-Fitzpatrick ◽  
Majed S. Al-Ghamdi ◽  
Eihab Abdel-Rahman ◽  
...  
Keyword(s):  
Quality Factor ◽  
Fundamental Frequency ◽  
High Quality Factor ◽  
Silicon On Insulator ◽  
Comb Drive ◽  
High Quality ◽  
Sensor Applications ◽  
Fabrication And Characterization

This paper reports on the design, fabrication, and characterization of non-interdigitated comb drive actuators in Silicon-on-Insulator (SOI) wafers, using a single mask surface microma-chining process. The response of the actuator is analyzed numerically and experimentally. The results show at the fundamental frequency; it behaves as a longitudinal comb drive actuator. At a higher frequency, it exhibits a high-quality factor which is appropriate for sensor applications.

Fabrication and Characterization of High-Quality Factor GaN-Based Resonant-Cavity Blue Light-Emitting Diodes

2012 ◽  
Vol 24 (17) ◽  
pp. 1472-1474 ◽  
Author(s):  
Xiao-Long Hu ◽  
Wen-Jie Liu ◽  
Guo-En Weng ◽  
Jiang-Yong Zhang ◽  
Xue-Qin Lv ◽  
...  
Keyword(s):  
Quality Factor ◽  
Blue Light ◽  
Light Emitting Diodes ◽  
Resonant Cavity ◽  
High Quality Factor ◽  
High Quality ◽  
Light Emitting ◽  
Fabrication And Characterization

High Quality Factor Photonic Crystal Nanobeam Cavities and Their Applications

2009 ◽  
Author(s):  
M. Loncar ◽  
P. B Deotare ◽  
M. W. McCutcheon ◽  
M. Khan ◽  
Y. Zhang ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Quality Factor ◽  
High Quality Factor ◽  
High Quality ◽  
Nanobeam Cavities

High Quality Factor Deuterated Silicon Nitride (SiN:D) Microring Resonators

2018 ◽  
Author(s):  
Zeru Wu ◽  
Zengkai Shao ◽  
Zihan Xu ◽  
Yanfeng Zhang ◽  
Lin Liu ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Quality Factor ◽  
High Quality Factor ◽  
Microring Resonators ◽  
High Quality

scholarly journals Methods to achieve ultra-high quality factor silicon nitride resonators

APL Photonics ◽  
2021 ◽  
Vol 6 (7) ◽  
pp. 071101
Author(s):  
Xingchen Ji ◽  
Samantha Roberts ◽  
Mateus Corato-Zanarella ◽  
Michal Lipson
Keyword(s):  
Silicon Nitride ◽  
Quality Factor ◽  
High Quality Factor ◽  
High Quality

scholarly journals High quality factor photonic crystal nanobeam cavities

2009 ◽  
Vol 94 (12) ◽  
pp. 121106 ◽  
Author(s):  
Parag B. Deotare ◽  
Murray W. McCutcheon ◽  
Ian W. Frank ◽  
Mughees Khan ◽  
Marko Lončar
Keyword(s):  
Photonic Crystal ◽  
Quality Factor ◽  
High Quality Factor ◽  
High Quality ◽  
Nanobeam Cavities
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