Phase-shifting interferometry in the presence of nonlinear phase steps, harmonics, and noise

2006 ◽  
Vol 31 (8) ◽  
pp. 1058 ◽  
Author(s):  
Rajesh Langoju ◽  
Abhijit Patil ◽  
Pramod Rastogi
Keyword(s):  
Phase Shifting ◽  
Phase Shifting Interferometry ◽  
Nonlinear Phase

Accurate nonlinear phase step estimation in phase shifting interferometry

2006 ◽  
Vol 266 (2) ◽  
pp. 638-647 ◽  
Author(s):  
Rajesh Langoju ◽  
Abhijit Patil ◽  
Pramod Rastogi
Keyword(s):  
Phase Shifting ◽  
Phase Step ◽  
Phase Shifting Interferometry ◽  
Nonlinear Phase

scholarly journals High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting Interferometry

2021 ◽  
Vol 2021 ◽  
pp. 1-8
Author(s):  
Donge Zhao ◽  
Chaozheng Jia ◽  
Yayun Ma ◽  
Xuefeng Yang ◽  
Bin Zhang ◽  
...  
Keyword(s):  
Phase Modulation ◽  
Spatial Light Modulator ◽  
Surface Profile ◽  
Phase Shifting ◽  
Profile Measurement ◽  
Vortex Beam ◽  
Light Modulator ◽  
Vortex Phase ◽  
Phase Shifting Interferometry ◽  
Nonlinear Phase

According to the principle of phase-shifting interferometry and spiral phase characteristics of the vortex beam, this article proposes a method for detecting the surface profile of a transparent object, in which the +1 order vortex beam is generated by a spatial light modulator and is taken as the reference light. The influence of the nonlinear phase modulation characteristics of the spatial light modulator on the measurement precision is studied. The results show that nonlinear phase modulation has a great impact on the measurement. Then, the vortex lights with initial phases of 0, π/2, π, and 3π/2 are used to measure the H-type thin film sample based on the Twyman-Green interference system after correcting the nonlinear phase modulation characteristics. The experimental results show that the measurement error of the surface profile to an object with the theoretical value of 20 nm is 1.146 nm, and the feasibility of the optical vortex phase-shifting technique used to measure the surface profile of an object is verified.

Phase-shifting interferometry with uncalibrated phase shifts

2000 ◽  
Vol 39 (4) ◽  
pp. 585 ◽  
Author(s):  
Xin Chen ◽  
Maureen Gramaglia ◽  
John A. Yeazell
Keyword(s):  
Phase Shifts ◽  
Phase Shifting ◽  
Phase Shifting Interferometry
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