High precision coating technology for large aperture NIF optics

2001 ◽  
Author(s):  
James Oliver ◽  
J. Howe ◽  
A. Rigatti ◽  
Douglas J Smith ◽  
C. Stolz
Keyword(s):  
High Precision ◽  
Coating Technology ◽  
Large Aperture

Research on Eliminating Cumulative Errors for Stitching Algorithm of Large Aperture Aspheric Optical Elements

2014 ◽  
Vol 924 ◽  
pp. 377-381
Author(s):  
Yan Ting Zhang ◽  
Xu Yang ◽  
Xin Li ◽  
Yin Biao Guo
Keyword(s):  
High Precision ◽  
Measuring Method ◽  
Transformation Method ◽  
Aspheric Surface ◽  
Optical Elements ◽  
Fast Speed ◽  
Large Aperture ◽  
Precision Measuring ◽  
Surface Optical ◽  
Datum Transformation

The sptitching measuring method applied in large-aperture aspheric surface optical elements can expand the range of precision measuring instrument. And the key point is developing the technique for high precision measuring data processing. To deal with the problem of cumulative errors which existed in the process of multi-section stitching, datum-transformation method was proposed, according to the characteristic of stitching measurement. The stitching measuring experiments were carried out based on Talysurf PGI 1240 profilometer of Taylor Hobson Company to verify the purpose for eliminating cumulative errors. The results show that datum-transformation method is feasible with the characteristic such as fast speed, high precision, and good operability.

scholarly journals Multiposition Rotation Interference Absolute Measurement Method for High-Precision Optical Component Surfaces

2021 ◽  
Vol 2021 ◽  
pp. 1-8
Author(s):  
Xueliang Zhu ◽  
Fengming Nie ◽  
Bingcai Liu ◽  
Ruikun Liu ◽  
Ailing Tian
Keyword(s):  
High Precision ◽  
Measurement Method ◽  
Absolute Measurement ◽  
Optical Component ◽  
Computational Method ◽  
Surface Measurement ◽  
Measurement Technology ◽  
Reference Mirror ◽  
Large Aperture ◽  
Absolute Measurements

Modern optical engineering requires increasingly sophisticated interferometry methods capable of conducting subnanometer scale measurements of the large aperture, high-precision optical component surfaces. However, the accuracy of interferometry measurement is limited to the accuracy with which the surface of the reference mirror employed in the interferometer system is known, and the influence of gravity-induced deformation cannot be ignored. This is addressed in the present work by proposing a three-flat testing method based on multiposition rotation interference absolute surface measurement technology that combines the basic theory of N-position rotation with the separability of surface wavefront functions into sums of even and odd functions. These functions provide the rotational symmetric components of the wavefront, which then enables the absolute surface to be reconstructed based on the N-position rotation measurements. In addition, we propose a mechanical clamping combined with computational method to compensate for the gravity-induced deformations of the flats in the multiposition rotation absolute measurements. The high precision of the proposed absolute surface measurement method is demonstrated via simulations. The results of laboratory experiments indicate that the combination compensation method provides the high-precision surface reconstruction outcomes. The present work provides an important contribution for supporting the interferometry measurement of large aperture, high-precision optical component surfaces.

Development of high precision temperature control device for large aperture frequency doubling crystal

2017 ◽  
Vol 46 (4) ◽  
pp. 420001
Author(s):  
刘保麟 Liu Baolin ◽  
张 鹏 Zhang Peng ◽  
孙付仲 Sun Fuzhong ◽  
张庆春 Zhang Qingchun ◽  
卢礼华 Lu Lihua
Keyword(s):  
High Precision ◽  
Temperature Control ◽  
Frequency Doubling ◽  
Control Device ◽  
Large Aperture ◽  
Precision Temperature ◽  
Precision Temperature Control ◽  
Temperature Control Device

scholarly journals A novel 5-DOF high-precision compliant parallel mechanism for large-aperture grating tiling

2017 ◽  
Vol 8 (2) ◽  
pp. 349-358 ◽  
Author(s):  
Zhongxi Shao ◽  
Shilei Wu ◽  
Jinguo Wu ◽  
Hongya Fu
Keyword(s):  
High Precision ◽  
Parallel Mechanism ◽  
Closed Loop ◽  
Load Capacity ◽  
Performance Testing ◽  
Closed Loop Control ◽  
Parallel Mechanisms ◽  
Loop Control ◽  
Large Aperture ◽  
Compliant Parallel Mechanism

Abstract. In combination with the advantages of parallel mechanisms and compliant mechanisms, a 5-DOF compliant parallel mechanism is designed to meet the requirements, such as large stroke, large load capacity, high precision and high stability, for a large-aperture grating tiling device. The structure and characteristics of the 5-DOF compliant parallel mechanism are presented. The kinematics of the mechanism are derived based on a pseudo-rigid-body model as well. To increase the tiling position retention stability of the mechanism, a closed-loop control system with capacitive position sensors, which are employed to provide feedback signals, is realized. A position and orientation monitoring algorithm and a single neuron adaptive full closed-loop control algorithm are proposed. Performance testing is implemented to verify the accuracy and the tiling position retention stability of the grating tiling device. The experimental results indicate that the tiling accuracy reaches 0.2 µrad per step and 20 nm per step, and the tiling position retention stability can achieve 1.2 µrad per 30 min and 35 nm per 30 min in the rotational direction and the translational direction, respectively.

Precision analysis of a small-sized large aperture high precision encoder

2010 ◽  
Vol 24 (8) ◽  
pp. 780-785
Author(s):  
Yingcai Du ◽  
Qiuhua Wan ◽  
Xinran Lu ◽  
Lihui Liang
Keyword(s):  
High Precision ◽  
Precision Analysis ◽  
Large Aperture
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