A new polishing process for large-aperture and high-precision aspheric surface

Author(s):  
Xuqing Nie ◽  
Shengyi Li ◽  
Yifan Dai ◽  
Ci Song
2014 ◽  
Vol 924 ◽  
pp. 377-381
Author(s):  
Yan Ting Zhang ◽  
Xu Yang ◽  
Xin Li ◽  
Yin Biao Guo

The sptitching measuring method applied in large-aperture aspheric surface optical elements can expand the range of precision measuring instrument. And the key point is developing the technique for high precision measuring data processing. To deal with the problem of cumulative errors which existed in the process of multi-section stitching, datum-transformation method was proposed, according to the characteristic of stitching measurement. The stitching measuring experiments were carried out based on Talysurf PGI 1240 profilometer of Taylor Hobson Company to verify the purpose for eliminating cumulative errors. The results show that datum-transformation method is feasible with the characteristic such as fast speed, high precision, and good operability.


Author(s):  
Qizhi Zhao ◽  
Lei Zhang ◽  
Yanjun Han ◽  
Cheng Fan

As a new polishing method, bonnet polishing is suitable for polishing the curved surface due to its advantages in flexibility and adaptability of the polishing tool. In the polishing process, the contact state between the bonnet and the curved surface always changes. The traditional polishing tool path with equal interval will inevitably lead to over-polished areas and unpolished areas. In this article, a new tool path for bonnet polishing, which is called the revised Archimedes spiral polishing path, is proposed to ensure the physical uniform coverage of the curved surface in bonnet polishing. The path generation method is based on the modified tool–workpiece contact model and the pointwise searching algorithm. To prove the effectiveness of the revised path, two aspheric workpieces were polished along the traditional Archimedes spiral polishing path and the revised path, respectively. The roughnesses of the two workpieces are 10.94 and 10 nm, and the profile tolerances are 0.4097 and 0.2037 μm, respectively. The experimental results show that the revised path achieves lower roughness and surface tolerance than the traditional Archimedes path, which indicates that the revised path can achieve uniform physical coverage on the surface.


2011 ◽  
Vol 314-316 ◽  
pp. 1750-1753
Author(s):  
Chuan Zhang ◽  
Ping Wang ◽  
Yao Long Chen

In this paper, two processing techniques—full parameters technique and part parameters technique—for aspheric surface grinding are expatiated. Both of them are based on the priciple of computer-controlled optical surface (CCOS) and developed from trajectory forming method. We also have carried out appropriative software to digitalize processing technology. Proved by practical process, both of them are reliable and reproducible. Full parameters technique is easy to operate, but the accuracy of surface is to large extent dependent on the accuracy of measurement; Part parameters technique can avoid these measurements, however, it has certain requirements for operator. However, its requirements are still much less than those of traditional technique.


2021 ◽  
Vol 2021 ◽  
pp. 1-8
Author(s):  
Xueliang Zhu ◽  
Fengming Nie ◽  
Bingcai Liu ◽  
Ruikun Liu ◽  
Ailing Tian

Modern optical engineering requires increasingly sophisticated interferometry methods capable of conducting subnanometer scale measurements of the large aperture, high-precision optical component surfaces. However, the accuracy of interferometry measurement is limited to the accuracy with which the surface of the reference mirror employed in the interferometer system is known, and the influence of gravity-induced deformation cannot be ignored. This is addressed in the present work by proposing a three-flat testing method based on multiposition rotation interference absolute surface measurement technology that combines the basic theory of N-position rotation with the separability of surface wavefront functions into sums of even and odd functions. These functions provide the rotational symmetric components of the wavefront, which then enables the absolute surface to be reconstructed based on the N-position rotation measurements. In addition, we propose a mechanical clamping combined with computational method to compensate for the gravity-induced deformations of the flats in the multiposition rotation absolute measurements. The high precision of the proposed absolute surface measurement method is demonstrated via simulations. The results of laboratory experiments indicate that the combination compensation method provides the high-precision surface reconstruction outcomes. The present work provides an important contribution for supporting the interferometry measurement of large aperture, high-precision optical component surfaces.


2013 ◽  
Vol 325-326 ◽  
pp. 804-808
Author(s):  
Dong Xu Zhang ◽  
Zhen Zhong Wang ◽  
Zhan Shuai Wang ◽  
Yan Ting Zhang ◽  
Xin Li ◽  
...  

The splicing measuring method applied in large-aperture aspheric surface optical elements, can extend the range of precision measuring instrument and expand measurement capability of the system. In this paper, two methods are proposed: the fitting evaluation method and the curvature comparison method in the light of how to reject the redundant data of the splicing coincidence part, and the theoretical analysis are investigated to calculate the theoretical error. The Talysurf PGI 1240 profilometer of Taylor Hobson Company is used as application object to do experimental research. The results show that the curvature comparison method is feasible and has characteristic such as fast speed, high precision, and good operability.


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