scholarly journals Self-compensation of errors in optical coating production with monochromatic monitoring

2021 ◽  
Author(s):  
Alexander Tikhonravov ◽  
Iuri Lagutin ◽  
Alena Lagutina ◽  
Dmitry Lukyanenko ◽  
Igor Kochikov ◽  
...  
1989 ◽  
Vol 25 (5) ◽  
pp. 305 ◽  
Author(s):  
A. Cichocki ◽  
R. Unbehauen

2006 ◽  
Vol 45 (7) ◽  
pp. 1530 ◽  
Author(s):  
Alexander V. Tikhonravov ◽  
Michael K. Trubetskov ◽  
Tatiana V. Amotchkina ◽  
Alfred Thelen

2015 ◽  
Vol 9 (1) ◽  
pp. 093595 ◽  
Author(s):  
Yi-Jun Jen ◽  
Meng-Jie Lin ◽  
Ci-Yao Jheng ◽  
Wei-Chih Liu

2021 ◽  
Author(s):  
Sun-Kyung Kim ◽  
Eun-Joo Lee ◽  
Jin-Woo Cho ◽  
Young-Seok Kim

2010 ◽  
Vol 50 (9) ◽  
pp. C141 ◽  
Author(s):  
Alexander V. Tikhonravov ◽  
Michael K. Trubetskov ◽  
Tatiana V. Amotchkina ◽  
Vladimir Pervak

2016 ◽  
Vol 748 ◽  
pp. 012006 ◽  
Author(s):  
D Bernt ◽  
V Ponomarenko ◽  
A Pisarev
Keyword(s):  

2012 ◽  
Vol 51 (30) ◽  
pp. 7319 ◽  
Author(s):  
Alexander V. Tikhonravov ◽  
Michael K. Trubetskov

2015 ◽  
Vol 4 (2) ◽  
Author(s):  
Markus K. Tilsch ◽  
Michael S. O’Donnell

AbstractMost deposition chambers sold into the optical coating market today are outfitted with an automated control system. We surveyed several of the larger equipment providers, and nine of them responded with information about their hardware architecture, data logging, level of automation, error handling, user interface, and interfacing options. In this paper, we present a summary of the results of the survey and describe commonalities and differences together with some considerations of tradeoffs, such as between capability for high customization and simplicity of operation.


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