Optimization of Selective Laser Etching (SLE) for Glass Micromechanical Structure Fabrication
Keyword(s):
2001 ◽
Vol 40
(Part 2, No. 10B)
◽
pp. L1116-L1118
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2019 ◽
Vol 22
(2)
◽
pp. 131-142
Keyword(s):
2000 ◽
Vol 168
(1-4)
◽
pp. 335-339
◽
Keyword(s):
2018 ◽
Vol 16
(1_suppl)
◽
pp. 125-131