scholarly journals High-accuracy measurement system for the refractive index of air based on a simple double-beam interferometry

2021 ◽  
Vol 29 (2) ◽  
pp. 1396
Author(s):  
Hongtang Gao ◽  
Zhongyu Wang ◽  
Wei Zou ◽  
Yuzhang Liu ◽  
Shuanghua Sun
Keyword(s):  
Refractive Index ◽  
Measurement System ◽  
High Accuracy ◽  
Accuracy Measurement ◽  
Double Beam ◽  
High Accuracy Measurement

Design and Evaluation of a High-Accuracy Measurement System for Sheet Resistance of Thin Films

2014 ◽  
Vol 609-610 ◽  
pp. 106-112 ◽  
Author(s):  
Hai Bin Pan ◽  
Jian Ning Ding ◽  
Bao Guo Cao ◽  
Guang Gui Cheng
Keyword(s):  
Thin Films ◽  
Sheet Resistance ◽  
Measurement System ◽  
High Accuracy ◽  
Voltage Measurement ◽  
Switching Circuit ◽  
Digital Output ◽  
Accuracy Measurement ◽  
Output Module ◽  
High Accuracy Measurement

Inspection and measurement for the sheet resistance and resistivity play a pivotal role in the semiconductor industry. In this study, a high-accuracy measurement system for sheet resistance of thin films was designed based on dual-measurement with four-point probe method. The measurement system was composed of a special switching circuit, a digital output module, Keithley 2400 SourceMeter, and a computer running LabVIEW. The special switching circuit designed based on the multiplexer played an important role in current probes and voltage probes automatic switching under the control of virtual instrumentation software LabVIEW and National instruments digital output module hardware NI 9401. Keithley 2400 SourceMeter controlled by LabVIEW was used for two-times high-precision voltage measurement. Van der Pauw correction factor were calculated based on the results of the two-times voltage measurement. Then the sheet resistance of thin films was calculated by LabVIEW softwares powerful computing. The experimental results show that the designed and developed system can meet the needs of fast on-line measurement of thin films sheet resistance with a wide range, and moreover, the accuracy of measurements and the level of automatization have been dramatically improved compared to the conventional measurement system.

Research on Liquid Concentration Real-Time Detecting System Based on F-P Interferometer

2006 ◽  
Vol 326-328 ◽  
pp. 143-146
Author(s):  
Wen Li Wei ◽  
Xiu Fang Yang
Keyword(s):  
Refractive Index ◽  
Optical Fiber ◽  
Tracking System ◽  
High Accuracy ◽  
Light Wavelength ◽  
Accuracy Measurement ◽  
Liquid Concentration ◽  
Dynamic Tracking ◽  
Transparent Liquid ◽  
High Accuracy Measurement

A kind of dynamic tracking system for conducting high accuracy measurement of transparent liquid concentration is designed by means of line matrix CCD receiving fringes in accordance with the relations between liquid concentration and refractive index as well as the relations among refractive index, interference light wavelength of optical fiber F-P interferometer and grade orders. The detecting system can recognize or detect 0.01% of concentration variations via measuring a group of alcohol.

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