scholarly journals Ellipsometric characterization of inhomogeneous thin films with complicated thickness non-uniformity: application to inhomogeneous polymer-like thin films

2020 ◽  
Vol 28 (24) ◽  
pp. 36796
Author(s):  
Ivan Ohlídal ◽  
Jiří Vohánka ◽  
Vilma Buršíková ◽  
Václav Šulc ◽  
Štěpán Šustek ◽  
...  
Keyword(s):  
Thin Films ◽  
Ellipsometric Characterization

Ellipsometric characterization of thin films and superlattices

1990 ◽  
Vol 5 (2) ◽  
pp. 285-289 ◽  
Author(s):  
J. Bremer ◽  
O. Hunderi ◽  
Kong Fanping
Keyword(s):  
Thin Films ◽  
Ellipsometric Characterization

scholarly journals Ellipsometric Characterization of Thin Films from Multicomponent Chalcogenide Glasses for Application in Modern Optical Devices

2013 ◽  
Vol 2013 ◽  
pp. 1-11 ◽  
Author(s):  
R. Todorov ◽  
J. Tasseva ◽  
V. Lozanova ◽  
A. Lalova ◽  
Tz. Iliev ◽  
...  
Keyword(s):  
Thin Films ◽  
Chalcogenide Glasses ◽  
Optical Constants ◽  
Thermal Evaporation ◽  
Optical Devices ◽  
Point Of View ◽  
Angle Of Incidence ◽  
Optical Elements ◽  
Ellipsometric Characterization

A review is given on the application of the reflectance ellipsometry for optical characterization of bulk materials and thin films with thickness betweenλ/20 and 2λ(atλ=632.8 nm). The knowledge of the optical constants (refractive index,n, and extinction coefficient,k) of thin films is of a great importance from the point of view of modelling and controlling the manufacture of various optical elements, such as waveguides, diffraction gratings, and microlenses. The presented results concern the optical properties of thin films from multicomponent chalcogenide glasses on the base of As2S3and GeS2determined by multiple-angle-of-incidence ellipsometry and regarded as a function of the composition and thickness. The homogeneity of the films is verified by applying single-angle calculations at different angles. Due to decomposition of the bulk glass during thermal evaporation, an optical inhomogeneity of the thin As (Ge)-S-Bi(Tl) films is observed. The profile ofnin depth of thin As-S-Tl (Bi) films was investigated by evaporation of discrete layers. It is demonstrated that homogenous layers from the previous compounds with controlled composition can be deposited by coevaporation of As2S3and metals or their compounds (Bi, Tl, In2S3).

Spectroscopic ellipsometric characterization of approximant thin films of Al–Cr–Fe

2003 ◽  
Vol 207 (1-4) ◽  
pp. 300-305 ◽  
Author(s):  
L. Johann ◽  
A. En Naciri ◽  
L. Broch ◽  
V. Demange ◽  
J. Ghambaja ◽  
...  
Keyword(s):  
Thin Films ◽  
Ellipsometric Characterization

scholarly journals Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials

2020 ◽  
Vol 28 (4) ◽  
pp. 5492 ◽  
Author(s):  
Jiří Vohánka ◽  
Daniel Franta ◽  
Martin Čermák ◽  
Vojtěch Homola ◽  
Vilma Buršíková ◽  
...  
Keyword(s):  
Thin Films ◽  
Ellipsometric Characterization

Raman and ellipsometric characterization of hydrogenated amorphous silicon thin films

2008 ◽  
Vol 52 (2) ◽  
pp. 339-343 ◽  
Author(s):  
NaiMan Liao ◽  
Wei Li ◽  
YueJun Kuang ◽  
YaDong Jiang ◽  
ShiBin Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Thin Films ◽  
Ellipsometric Characterization ◽  
Hydrogenated Amorphous
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