scholarly journals Real-time motion-induced-error compensation in 3D surface-shape measurement

2019 ◽  
Vol 27 (18) ◽  
pp. 25265 ◽  
Author(s):  
Xinran Liu ◽  
Tianyang Tao ◽  
Yingying Wan ◽  
Jonathan Kofman
Keyword(s):  
Real Time ◽  
Error Compensation ◽  
Surface Shape ◽  
Shape Measurement ◽  
Time Motion ◽  
3D Surface

Real-time surface shape measurement by an active interferometer

1997 ◽  
Vol 4 (1) ◽  
pp. A216-A220 ◽  
Author(s):  
Ji-Yuan Liu ◽  
Ichirou Yamaguchi ◽  
Jun-ichi Kato ◽  
Toshinori Nakajima
Keyword(s):  
Real Time ◽  
Surface Shape ◽  
Shape Measurement ◽  
Active Interferometer

Wavelength scanning profilometry for real-time surface shape measurement

1997 ◽  
Vol 36 (19) ◽  
pp. 4473 ◽  
Author(s):  
Susumu Kuwamura ◽  
Ichirou Yamaguchi
Keyword(s):  
Real Time ◽  
Surface Shape ◽  
Shape Measurement ◽  
Wavelength Scanning

Motion and Environment Error Compensation for Ultra-Precision Lathe

2005 ◽  
Vol 297-300 ◽  
pp. 2339-2344
Author(s):  
Lee Ku Kwac ◽  
Jae Yeol Kim ◽  
Young Tae Cho
Keyword(s):  
Real Time ◽  
Error Compensation ◽  
Response Speed ◽  
Inertial Mass ◽  
Diamond Turning ◽  
Displacement Sensor ◽  
Motion Error ◽  
Flat Surfaces ◽  
Time Motion ◽  
Ultra Precision

Recently, the demand for Ultra-precision products is rapidly increasing, especially in such industries as semi-conductors, computers, aerospace, and precision machinary. Ultra-precision processing is also extremely needed for NT in the field of mechanical engineering. Lately, together with drastic advancement of electronic and photonics industry, the need of Ultra-precision processing is increased in the manufacturing of various kernel parts, which are connected with these industrial fields. Especially, motion accuracy to nanometers is required in order in stroke of hundreds millimeters according as the diameter of the processed object great and the processing accuracy rises. In this case, the response speed absolute delay due to inertial mass of the moving parts is very large. Therefore, real-time motion error compensation becomes the barest necessity. In this paper, we used ultra-precision cutting unit (UPCU) to cope with the problem. A special UPCU was designed and tested to obtain sub-micrometer from accuracy in diamond turning of flat surfaces. The thermal growth spindle error was compensated in real time using the UPCU driven by piezoelectric actuator along with a laser encoder displacement sensor.

Real-time surface shape measurement by an active interferometer

1997 ◽  
Vol 4 (1) ◽  
pp. 216-220 ◽  
Author(s):  
Ji-Yuan Liu ◽  
Ichirou Yamaguchi ◽  
Jun-ichi Kato ◽  
Toshinori Nakajima
Keyword(s):  
Real Time ◽  
Surface Shape ◽  
Shape Measurement ◽  
Active Interferometer

scholarly journals Real-time motion-induced error compensation for 4-step phase-shifting profilometry

2021 ◽  
Author(s):  
Wenbo Guo ◽  
Zhoujie Wu ◽  
Qican Zhang ◽  
Yajun Wang
Keyword(s):  
Real Time ◽  
Error Compensation ◽  
Phase Shifting ◽  
Time Motion
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