scholarly journals Direct observation of structure-assisted filament splitting during ultrafast multiple-pulse laser ablation

2019 ◽  
Vol 27 (7) ◽  
pp. 10050 ◽  
Author(s):  
Feifei Wang ◽  
Changji Pan ◽  
Jingya Sun ◽  
Qingsong Wang ◽  
Yongfeng Lu ◽  
...  
2021 ◽  
Vol 11 (2) ◽  
pp. 509
Author(s):  
Le Phuong Hoang ◽  
Phuong Thao Nguyen ◽  
Thi Kim Cuc Nguyen ◽  
Toan Thang Vu ◽  
Xuan Binh Cao

2001 ◽  
Vol 73 (2) ◽  
pp. 143-149 ◽  
Author(s):  
E.G. Gamaly ◽  
A.V. Rode ◽  
A. Perrone ◽  
A. Zocco

2017 ◽  
Vol 402 ◽  
pp. 330-335 ◽  
Author(s):  
Jiaxin Yu ◽  
Junyi Nan ◽  
Heping Zeng

Author(s):  
F. Beaudoin ◽  
P. Perdu ◽  
C. DeNardi ◽  
R. Desplats ◽  
J. Lopez ◽  
...  

Abstract Ultra-short pulse laser ablation is applied to IC backside sample preparation. It is contact-less, non-thermal, precise and can ablate the various types of material present in IC packages. This study concerns the optimization of ultra-short pulse laser ablation for silicon thinning. Uncontrolled silicon roughness and poor uniformity of the laser thinned cavity needed to be tackled. Special care is taken to minimize the silicon RMS roughness to less than 1µm. Application to sample preparation of 256Mbit devices is presented.


2009 ◽  
Vol 255 (17) ◽  
pp. 7605-7609 ◽  
Author(s):  
D.P. Korfiatis ◽  
K.-A. Th. Thoma ◽  
J.C. Vardaxoglou

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