Mechanisms of ablation-rate decrease in multiple-pulse laser ablation

2001 ◽  
Vol 73 (2) ◽  
pp. 143-149 ◽  
Author(s):  
E.G. Gamaly ◽  
A.V. Rode ◽  
A. Perrone ◽  
A. Zocco
2019 ◽  
Vol 27 (7) ◽  
pp. 10050 ◽  
Author(s):  
Feifei Wang ◽  
Changji Pan ◽  
Jingya Sun ◽  
Qingsong Wang ◽  
Yongfeng Lu ◽  
...  

2021 ◽  
Vol 11 (2) ◽  
pp. 509
Author(s):  
Le Phuong Hoang ◽  
Phuong Thao Nguyen ◽  
Thi Kim Cuc Nguyen ◽  
Toan Thang Vu ◽  
Xuan Binh Cao

2017 ◽  
Vol 402 ◽  
pp. 330-335 ◽  
Author(s):  
Jiaxin Yu ◽  
Junyi Nan ◽  
Heping Zeng

Author(s):  
Ze Liu ◽  
Benxin Wu ◽  
Rong Xu ◽  
Kejie Zhao ◽  
Yung C. Shin

Previous investigations on “double-pulse” nanosecond (ns) laser drilling reported in the literature typically utilize double pulses of equal or similar pulse energies. In this paper, “double-pulse” ns laser drilling using double pulses with energies differing by more than ten times has been studied, where both postprocess workpiece characterizations and in situ time-resolved shadowgraph imaging observations have been performed. A very interesting physical phenomenon has been discovered under the studied conditions: the “double-pulse” ns laser ablation process, where the low-energy pulse precedes the high-energy pulse (called “low-high double-pulse” laser ablation) by a suitable amount of time, can produce significantly higher ablation rates than “high-low double-pulse” or “single-pulse” laser ablation under a similar laser energy input. In particular, “low-high double-pulse” laser ablation at a suitable interpulse separation time can drill through a ∼0.93 mm thick aluminum 7075 workpiece in less than 200 pulse pairs, while “high-low double-pulse” or “single-pulse” laser ablation cannot drill through the workpiece even using 1000 pulse pairs or pulses, respectively. This indicates that “low-high double-pulse” laser ablation has led to a significantly enhanced average ablation rate that is more than five times those for “single-pulse” or “high-low double-pulse” laser ablation. The fundamental physical mechanism for the ablation rate enhancement has been discussed, and a hypothesized explanation has been given.


Author(s):  
F. Beaudoin ◽  
P. Perdu ◽  
C. DeNardi ◽  
R. Desplats ◽  
J. Lopez ◽  
...  

Abstract Ultra-short pulse laser ablation is applied to IC backside sample preparation. It is contact-less, non-thermal, precise and can ablate the various types of material present in IC packages. This study concerns the optimization of ultra-short pulse laser ablation for silicon thinning. Uncontrolled silicon roughness and poor uniformity of the laser thinned cavity needed to be tackled. Special care is taken to minimize the silicon RMS roughness to less than 1µm. Application to sample preparation of 256Mbit devices is presented.


2009 ◽  
Vol 255 (17) ◽  
pp. 7605-7609 ◽  
Author(s):  
D.P. Korfiatis ◽  
K.-A. Th. Thoma ◽  
J.C. Vardaxoglou

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