scholarly journals Improvements on the uniformity of large-area microlens arrays in Fused Silica

2019 ◽  
Vol 27 (5) ◽  
pp. 6249 ◽  
Author(s):  
Raoul Kirner ◽  
Jeremy Béguelin ◽  
Martin Eisner ◽  
Wilfried Noell ◽  
Toralf Scharf ◽  
...  
Keyword(s):  
Fused Silica ◽  
Large Area ◽  
Microlens Arrays

Fabrication and measurement of fused silica microlens arrays

1993 ◽  
Author(s):  
Keith O. Mersereau ◽  
Casimir R. Nijander ◽  
Avi Y. Feldblum ◽  
Wesley P. Townsend
Keyword(s):  
Fused Silica ◽  
Microlens Arrays

Highly uniform manufacturing method for large-area microlens arrays

2017 ◽  
Vol 95 (1-4) ◽  
pp. 99-108 ◽  
Author(s):  
Xiaodong Zhang ◽  
Lihua Li ◽  
Zexiao Li ◽  
Changyuen Chan ◽  
Linlin Zhu ◽  
...  
Keyword(s):  
Large Area ◽  
Microlens Arrays ◽  
Manufacturing Method ◽  
Highly Uniform

Pulsed UV laser Raman and fluorescence spectroscopy of large-area fused silica photomask substrates

2000 ◽  
Author(s):  
Christian Muehlig ◽  
Sylvia Bark-Zollmann ◽  
Dieter Grebner ◽  
Wolfgang Triebel
Keyword(s):  
Fluorescence Spectroscopy ◽  
Fused Silica ◽  
Uv Laser ◽  
Large Area ◽  
Laser Raman

LARGE AREA PARALLEL SURFACE NANOSTRUCTURING WITH LASER IRRADIATION THROUGH MICROLENS ARRAYS

2010 ◽  
Vol 17 (03) ◽  
pp. 383-387
Author(s):  
C. S. LIM ◽  
M. H. HONG ◽  
Y. LIN ◽  
L. S. TAN ◽  
A. SENTHIL KUMAR ◽  
...  
Keyword(s):  
Substrate Surface ◽  
Microlens Array ◽  
Laser Pulses ◽  
Polymer Materials ◽  
Direct Writing ◽  
Large Area ◽  
Microlens Arrays ◽  
Force Microscopy ◽  
Surface Nanostructuring ◽  
Parallel Surface

In the past decade, the development of nanoelectronics and nano-optics has attracted much interest in surface nanostructuring of semiconductor materials. The irradiation of a microlens array by a laser beam generates many focused light spots, which can act as a direct writing tool on photo-polymer materials. This maskless surface nanostructuring technique enables thousands to millions of identical nano-features to be patterned in a couple of laser pulses. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) images show that nano-features were patterned uniformly on the substrate surface, which suggests a versatile way of parallel surface nanostructuring over a large area. The simulation results of the energy flux distribution at the focal plane of the microlens arrays will also be discussed.

Multilevel kinoform microlens arrays in fused silica for high-power laser optics

2004 ◽  
Author(s):  
Victor V. Atuchin ◽  
I. S. Soldatenkov ◽  
A. V. Kirpichnikov ◽  
E. V. Mikhailov ◽  
Efim V. Pestryakov ◽  
...  
Keyword(s):  
High Power ◽  
Fused Silica ◽  
High Power Laser ◽  
Power Laser ◽  
Microlens Arrays ◽  
Laser Optics

Effect of fused silica surface wettability on thermal reflow of polymer microlens arrays

2016 ◽  
Vol 23 (6) ◽  
pp. 2193-2206 ◽  
Author(s):  
D. Jucius ◽  
V. Grigaliūnas ◽  
A. Lazauskas ◽  
E. Sapeliauskas ◽  
B. Abakevičienė ◽  
...  
Keyword(s):  
Silica Surface ◽  
Fused Silica ◽  
Surface Wettability ◽  
Microlens Arrays ◽  
Thermal Reflow

scholarly journals Large-Area Fabrication of Laser-Induced Periodic Surface Structures on Fused Silica Using Thin Gold Layers

Nanomaterials ◽  
2020 ◽  
Vol 10 (6) ◽  
pp. 1187 ◽  
Author(s):  
Clemens Kunz ◽  
Sebastian Engel ◽  
Frank Müller ◽  
Stephan Gräf
Keyword(s):  
Fused Silica ◽  
Surface Structures ◽  
Spatial Period ◽  
Direct Writing ◽  
Large Area ◽  
Periodic Surface ◽  
Single Spot ◽  
Research Activities ◽  
Wide Range ◽  
Fs Laser

Despite intensive research activities in the field of laser-induced periodic surface structures (LIPSS), the large-area nanostructuring of glasses is still a challenging problem, which is mainly caused by the strongly non-linear absorption of the laser radiation by the dielectric material. Therefore, most investigations are limited to single-spot experiments on different types of glasses. Here, we report the homogeneous generation of LIPSS on large-area surfaces of fused silica using thin gold layers and a fs-laser with a wavelength λ = 1025 nm, a pulse duration τ = 300 fs, and a repetition frequency frep = 100 kHz as radiation source. For this purpose, single-spot experiments are performed to study the LIPSS formation process as a function of laser parameters and gold layer thickness. Based on these results, the generation of large-area homogenous LIPSS pattern was investigated by unidirectional scanning of the fs-laser beam across the sample surface using different line spacing. The nanostructures are characterized by a spatial period of about 360 nm and a modulation depth of around 160 nm. Chemical surface analysis by Raman spectroscopy confirms a complete ablation of the gold film by the fs-laser irradiation. The characterization of the functional properties shows an increased transmission of the nanostructured samples accompanied by a noticeable change in the wetting properties, which can be additionally modified within a wide range by silanization. The presented approach enables the reproducible LIPSS-based laser direct-writing of sub-wavelength nanostructures on glasses and thus provides a versatile and flexible tool for novel applications in the fields of optics, microfluidics, and biomaterials.

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