scholarly journals 𝛍m-resolution thickness distribution measurement of transparent glass films by using a multi-wavelength phase-shift extraction method in the large lateral shearing interferometer

2019 ◽  
Vol 27 (3) ◽  
pp. 2899 ◽  
Author(s):  
Yugang Ren ◽  
Zhang Cao ◽  
Xiaoyang Tang ◽  
Heng Xie ◽  
Lijun Xu
Keyword(s):  
Phase Shift ◽  
Extraction Method ◽  
Thickness Distribution ◽  
Distribution Measurement ◽  
Transparent Glass ◽  
Lateral Shearing Interferometer ◽  
Lateral Shearing ◽  
Multi Wavelength ◽  
Glass Films

Lateral shearing interferometer for phase-shift mask measurement at 193 nm

2002 ◽  
Author(s):  
Gerald Fuetterer ◽  
M. Lano ◽  
Norbert Lindlein ◽  
Johannes Schwider
Keyword(s):  
Phase Shift ◽  
Lateral Shearing Interferometer ◽  
Lateral Shearing ◽  
193 Nm ◽  
Phase Shift Mask

Analysis of laser M2 determination in a quadriwave lateral shearing interferometer with CCD vertical blooming

2019 ◽  
Vol 433 ◽  
pp. 183-189
Author(s):  
Lingqiang Meng ◽  
Yiming Liu ◽  
Zhigang Han ◽  
Hua Shen ◽  
Lei Chen ◽  
...  
Keyword(s):  
Lateral Shearing Interferometer ◽  
Lateral Shearing

Instantaneous Phase-Shifting Lateral-Shearing Interferometer

2008 ◽  
Vol 52 (4) ◽  
pp. 1004-1009 ◽  
Author(s):  
Jae Bong Song ◽  
Yun Woo Lee ◽  
Ho Soon Yang
Keyword(s):  
Phase Shifting ◽  
Instantaneous Phase ◽  
Lateral Shearing Interferometer ◽  
Lateral Shearing

Phase Shifting Jamin Lateral Shearing Interferometer

2009 ◽  
Vol 36 (5) ◽  
pp. 1156-1159
Author(s):  
王利娟 Wang Lijuan ◽  
刘立人 Liu Liren ◽  
栾竹 Luan Zhu ◽  
孙建锋 Sun Jianfeng ◽  
周煜 Zhou Yu
Keyword(s):  
Phase Shifting ◽  
Lateral Shearing Interferometer ◽  
Lateral Shearing
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