Laser heterodyne interferometer with rotational error compensation for precision displacement measurement
2011 ◽
Vol 36
(2)
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pp. 279-286
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2006 ◽
Vol 34
(1)
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pp. 67-70
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2018 ◽
Vol 1
(3)
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Keyword(s):
2020 ◽
Vol 304
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pp. 111880
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2005 ◽
Vol 295-296
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pp. 189-194
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