scholarly journals Multi-channel absolute distance measurement system with sub ppm-accuracy and 20 m range using frequency scanning interferometry and gas absorption cells

2014 ◽  
Vol 22 (20) ◽  
pp. 24869 ◽  
Author(s):  
John Dale ◽  
Ben Hughes ◽  
Andrew J. Lancaster ◽  
Andrew J. Lewis ◽  
Armin J. H. Reichold ◽  
...  
2015 ◽  
Vol 35 (s2) ◽  
pp. s212001
Author(s):  
许立明 Xu Liming ◽  
宋有建 Song Youjian ◽  
梁飞 Liang Fei ◽  
师浩森 Shi Haosen ◽  
胡明列 Hu Minglie ◽  
...  

2020 ◽  
Vol 238 ◽  
pp. 06011
Author(s):  
Jan Spichtinger ◽  
Michael Schulz ◽  
Gerd Ehret

We are developing a form measurement system for the surfaces of freeform optics and large conventional optics. The specifications of the optics are diameters up to 1.5 m and radii of curvature down to 10 m. This includes optics like telescope mirror segments and synchrotron optics. Using a Fizeau interferometer, we propose a subaperture stitching method that involves vertically aligning the interferometer’s optical axis to the local surface gradient and measuring the absolute distance from the interferometer’s reference flat to the specimen. Experimental results for the absolute distance measurement are shown.


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