scholarly journals Waveguide-mode interference lithography technique for high contrast subwavelength structures in the visible region

2014 ◽  
Vol 22 (15) ◽  
pp. 18748 ◽  
Author(s):  
Kanta Kusaka ◽  
Hiroyuki Kurosawa ◽  
Seigo Ohno ◽  
Yozaburo Sakaki ◽  
Kazuyuki Nakayama ◽  
...  
Keyword(s):  
Waveguide Mode ◽  
Visible Region ◽  
Interference Lithography ◽  
Subwavelength Structures ◽  
High Contrast ◽  
Mode Interference ◽  
Lithography Technique

Theoretical study of multiexposure zeroth-order waveguide mode interference lithography

2018 ◽  
Vol 50 (9) ◽  
Author(s):  
Zhiyuan Pang ◽  
Huan Tong ◽  
Xiaoxiong Wu ◽  
Jiankai Zhu ◽  
Xiangxian Wang ◽  
...  
Keyword(s):  
Waveguide Mode ◽  
Theoretical Study ◽  
Interference Lithography ◽  
Zeroth Order ◽  
Mode Interference

scholarly journals Ultrahigh spatial-frequency, high-contrast periodic structures produced by interference lithography

1996 ◽  
Author(s):  
H. T. Nguyen ◽  
J. A. Britten ◽  
R. D. Boyd ◽  
B. D. Shore ◽  
M. D. Perry
Keyword(s):  
Spatial Frequency ◽  
Periodic Structures ◽  
Interference Lithography ◽  
High Contrast

Novel high-contrast phase-shifting masks for EUV interference lithography

2020 ◽  
Author(s):  
Bernhard Lüttgenau ◽  
Sascha Brose ◽  
Serhiy Danylyuk ◽  
Jochen Stollenwerk ◽  
Peter Loosen
Keyword(s):  
Phase Shifting ◽  
Interference Lithography ◽  
High Contrast

Plasmonic interference lithography by coupling the bulk plasmon polariton mode and the waveguide mode

2020 ◽  
Vol 53 (13) ◽  
pp. 135103 ◽  
Author(s):  
Hongchao Liu ◽  
Weijie Kong ◽  
Qionggan Zhu ◽  
Yun Zheng ◽  
Kesheng Shen ◽  
...  
Keyword(s):  
Waveguide Mode ◽  
Interference Lithography ◽  
Bulk Plasmon ◽  
Plasmon Polariton
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