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Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths
Optics Express
◽
10.1364/oe.21.014036
◽
2013
◽
Vol 21
(12)
◽
pp. 14036
◽
Cited By ~ 106
Author(s):
Sebastian Romero-García
◽
Florian Merget
◽
Frank Zhong
◽
Hod Finkelstein
◽
Jeremy Witzens
Keyword(s):
Silicon Nitride
◽
Integrated Photonics
◽
Cmos Compatible
◽
Visible Wavelengths
Download Full-text
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A 300mm CMOS-compatible PECVD silicon nitride platform for integrated photonics with low loss and low process induced phase variation
Optical Fiber Communication Conference (OFC) 2019
◽
10.1364/ofc.2019.m1c.4
◽
2019
◽
Cited By ~ 1
Author(s):
Sandeep S. Saseendran
◽
Tangla D. Kongnyuy
◽
Bruno Figeys
◽
Federico Buja
◽
Benedetto Troia
◽
...
Keyword(s):
Silicon Nitride
◽
Phase Variation
◽
Integrated Photonics
◽
Low Loss
◽
Cmos Compatible
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CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures
Optics Express
◽
10.1364/oe.27.028588
◽
2019
◽
Vol 27
(20)
◽
pp. 28588
◽
Cited By ~ 4
Author(s):
P. R. Stanfield
◽
A. J. Leenheer
◽
C. P. Michael
◽
R. Sims
◽
M. Eichenfield
Keyword(s):
Cryogenic Temperatures
◽
Cmos Compatible
◽
Visible Wavelengths
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Optimized low-loss integrated photonics silicon-nitride Y-branch splitter
10.1063/5.0011452
◽
2020
◽
Author(s):
I. A. Krutov
◽
M. Yu. Saygin
◽
I. V. Dyakonov
◽
S. P. Kulik
Keyword(s):
Silicon Nitride
◽
Integrated Photonics
◽
Low Loss
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CMOS-compatible silicon nitride spectrometers for lab-on-a-chip spectral sensing
10.1117/12.2234978
◽
2016
◽
Cited By ~ 5
Author(s):
Eva Ryckeboer
◽
Xiaomin Nie
◽
Ananth Z. Subramanian
◽
Daan Martens
◽
Peter Bienstman
◽
...
Keyword(s):
Silicon Nitride
◽
Lab On A Chip
◽
Cmos Compatible
◽
Spectral Sensing
Download Full-text
Low Loss CMOS-Compatible PECVD Silicon Nitride Waveguides and Grating Couplers for Blue Light Optogenetic Applications
IEEE Photonics Journal
◽
10.1109/jphot.2016.2601782
◽
2016
◽
Vol 8
(5)
◽
pp. 1-11
◽
Cited By ~ 13
Author(s):
Luis Hoffman
◽
Ananth Subramanian
◽
Philippe Helin
◽
Bert Du Bois
◽
Roel Baets
◽
...
Keyword(s):
Silicon Nitride
◽
Blue Light
◽
Low Loss
◽
Grating Couplers
◽
Cmos Compatible
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Ultra-high Quality Factor Silicon Nitride Planar Microdisk Resonators for Integrated Photonics in the Visible Range
10.1364/ipnra.2008.imd5
◽
2008
◽
Author(s):
Ehsan Shah Hosseini
◽
Siva Yegnanarayanan
◽
Mohammad Soltani
◽
Ali Adibi
Keyword(s):
Silicon Nitride
◽
Quality Factor
◽
High Quality Factor
◽
Visible Range
◽
Integrated Photonics
◽
High Quality
◽
Microdisk Resonators
Download Full-text
Engineering in- and out-of-plane stress in PECVD silicon nitride for CMOS-compatible surface micromachining
10.1117/12.442962
◽
2001
◽
Cited By ~ 3
Author(s):
Rhodri R. Davies
◽
Mark E. McNie
◽
Kevin M. Brunson
◽
David Combes
Keyword(s):
Silicon Nitride
◽
Plane Stress
◽
Surface Micromachining
◽
Out Of Plane
◽
Cmos Compatible
Download Full-text
CMOS-compatible low stress silicon nitride films for photonic integration
Nanophotonics and Micro/Nano Optics VI
◽
10.1117/12.2574672
◽
2020
◽
Author(s):
Donghao Li
◽
Bin Li
◽
Bo Tang
◽
Wenjuan Xiong
◽
Peng Zhang
◽
...
Keyword(s):
Silicon Nitride
◽
Photonic Integration
◽
Silicon Nitride Films
◽
Cmos Compatible
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CMOS-Compatible Silicon Nitride Waveguide on Silicon Photonics Platform
10.1364/iprsn.2021.itu3a.3
◽
2021
◽
Author(s):
Yuriko Maegami
◽
Makoto Okano
◽
Guangwei Cong
◽
Keijiro Suzuki
◽
Morifumi Ohno
◽
...
Keyword(s):
Silicon Nitride
◽
Silicon Photonics
◽
Cmos Compatible
Download Full-text
Gallium- and Silicon Nitride-Based Photonic Integrated Circuits for Visible Wavelengths
Conference on Lasers and Electro-Optics
◽
10.1364/cleo_at.2020.jth2b.19
◽
2020
◽
Author(s):
Riazul Arefin
◽
Sujit Ramachandra
◽
Hyemin Jung
◽
Syed M. N. Hasan
◽
Weicheng You
◽
...
Keyword(s):
Silicon Nitride
◽
Integrated Circuits
◽
Photonic Integrated Circuits
◽
Visible Wavelengths
Download Full-text
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