scholarly journals Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo

2011 ◽  
Vol 19 (24) ◽  
pp. 23938 ◽  
Author(s):  
Sebastian Scheiding ◽  
Allen Y. Yi ◽  
Andreas Gebhardt ◽  
Lei Li ◽  
Stefan Risse ◽  
...  
Keyword(s):  
Fast Tool Servo ◽  
Lens Array ◽  
Curved Substrate

Diamond turning of gap-masked lens array on curved substrate

2020 ◽  
Author(s):  
Yiyu Li ◽  
Tin Wang ◽  
Siyun Chen ◽  
Xiaoli Hu ◽  
Haihua Feng ◽  
...  
Keyword(s):  
Diamond Turning ◽  
Lens Array ◽  
Curved Substrate

The Development of an Displacement Sensor Embedded Voice Coil Motor Based Fast-Tool-Servo for the Machining of Micro-Structure

2014 ◽  
Vol 625 ◽  
pp. 258-261 ◽  
Author(s):  
Zhi Jun Yang ◽  
You Dun Bai ◽  
Su Juan Wang ◽  
Xin Du Chen ◽  
Qiang Liu ◽  
...  
Keyword(s):  
External Force ◽  
Compliant Mechanism ◽  
Voice Coil Motor ◽  
Displacement Sensor ◽  
Fast Tool Servo ◽  
Optical Encoder ◽  
Lens Array ◽  
Ampere Force ◽  
Micro Lens Array ◽  
Micro Lens

The Fast Tool Servo (FTS) is widely used for the machining of micro-structures, especially for optical micro lens array. The working principle of FTS is that a voice coil motor or a piezoelectric (PZT) actuator is used as the driving elements, and the flexure hinges are developed as the guide mechanisms. In addition, an optical encoder is applied to measure the displacement. However, the existing design of FTS is too complicated and expensive. One reason is that the stroke of the FTS for the fabrication of optical micro lens array is only a few hundred micrometers, while its precision reaches to nanometric range, thus the optical encoder in not applicable. On the other hand, there exists sluggish and creep for piezoelectric materials, which makes the control of displacement difficult. This paper develops a displacement sensor embedded voice coil motor. In the design, the driving element is ampere force of the voice coil motor which is a linear ratio to the input current. Both the two covers are thin plates which serve as compliant mechanism by supporting the deformation at the Radial direction and provide linear stiffness in the axial direction. Therefore, the output displacement is proportional to the ampere force. The existence of external force affects the actual displacement, an embedded capacitor serves as displacement sensor will detects the real displacement, and the external force can be estimated by the current and measured displacement, which makes the motion control easy. At the same time, a multiphysics model of the developed FTS is built in this study by using finite element method and the displacement control under different cutting force is studied. The experimental results show that the developed FTS is efficient for achieving short stroke with high precision.

Scanning Toroidal Lens-array Antenna with a Zoned Profile for 60 GHz Band

2021 ◽  
pp. 1-1
Author(s):  
Alexander Maltsev ◽  
Olesya Bolkhovskaya ◽  
Valentin Seleznev
Keyword(s):  
Array Antenna ◽  
60 Ghz ◽  
Lens Array

Tri-axial Fast Tool Servo Using Hybrid Electromagnetic-Piezoelectric Actuation for Diamond Turning

2021 ◽  
pp. 1-1
Author(s):  
Zi-Hui Zhu ◽  
Li Chen ◽  
Yuhan Niu ◽  
Xiaonan Pu ◽  
Peng Huang ◽  
...  
Keyword(s):  
Diamond Turning ◽  
Piezoelectric Actuation ◽  
Fast Tool Servo

Three-axial cutting force measurement in micro/nano-cutting by utilizing a fast tool servo with a smart tool holder

CIRP Annals ◽  
2021 ◽  
Author(s):  
Yuan-Liu Chen ◽  
Fuwen Chen ◽  
Zhongwei Li ◽  
Yang Zhang ◽  
Bingfeng Ju ◽  
...  
Keyword(s):  
Cutting Force ◽  
Force Measurement ◽  
Fast Tool Servo ◽  
Tool Holder ◽  
Cutting Force Measurement

scholarly journals Integral 3D/2D partially convertible display using geometric phase lens array

2021 ◽  
Vol 3 ◽  
pp. 100061
Author(s):  
Hayato Watanabe ◽  
Takuya Omura ◽  
Naoto Okaichi ◽  
Hisayuki Sasaki ◽  
Jun Arai ◽  
...  
Keyword(s):  
Geometric Phase ◽  
Lens Array

scholarly journals Research on surface quality difference of Microlens array fabricated by fast tool servo cutting

2021 ◽  
pp. 1-1
Author(s):  
Yuetian Huang ◽  
Shijie Li ◽  
Jin Zhang ◽  
Chen Yang ◽  
Yingxiu Kong ◽  
...  
Keyword(s):  
Surface Quality ◽  
Microlens Array ◽  
Fast Tool Servo ◽  
Quality Difference
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