A new approach to fabricate micro lens array using fast tool servo

2011 ◽  
Vol 7 (5/6) ◽  
pp. 475 ◽  
Author(s):  
Jingbo Zhou ◽  
Tao Sun ◽  
Wenjun Zong
Keyword(s):  
Fast Tool Servo ◽  
New Approach ◽  
Lens Array ◽  
Micro Lens Array ◽  
Micro Lens

The Development of an Displacement Sensor Embedded Voice Coil Motor Based Fast-Tool-Servo for the Machining of Micro-Structure

2014 ◽  
Vol 625 ◽  
pp. 258-261 ◽  
Author(s):  
Zhi Jun Yang ◽  
You Dun Bai ◽  
Su Juan Wang ◽  
Xin Du Chen ◽  
Qiang Liu ◽  
...  
Keyword(s):  
External Force ◽  
Compliant Mechanism ◽  
Voice Coil Motor ◽  
Displacement Sensor ◽  
Fast Tool Servo ◽  
Optical Encoder ◽  
Lens Array ◽  
Ampere Force ◽  
Micro Lens Array ◽  
Micro Lens

The Fast Tool Servo (FTS) is widely used for the machining of micro-structures, especially for optical micro lens array. The working principle of FTS is that a voice coil motor or a piezoelectric (PZT) actuator is used as the driving elements, and the flexure hinges are developed as the guide mechanisms. In addition, an optical encoder is applied to measure the displacement. However, the existing design of FTS is too complicated and expensive. One reason is that the stroke of the FTS for the fabrication of optical micro lens array is only a few hundred micrometers, while its precision reaches to nanometric range, thus the optical encoder in not applicable. On the other hand, there exists sluggish and creep for piezoelectric materials, which makes the control of displacement difficult. This paper develops a displacement sensor embedded voice coil motor. In the design, the driving element is ampere force of the voice coil motor which is a linear ratio to the input current. Both the two covers are thin plates which serve as compliant mechanism by supporting the deformation at the Radial direction and provide linear stiffness in the axial direction. Therefore, the output displacement is proportional to the ampere force. The existence of external force affects the actual displacement, an embedded capacitor serves as displacement sensor will detects the real displacement, and the external force can be estimated by the current and measured displacement, which makes the motion control easy. At the same time, a multiphysics model of the developed FTS is built in this study by using finite element method and the displacement control under different cutting force is studied. The experimental results show that the developed FTS is efficient for achieving short stroke with high precision.

scholarly journals Phase Retrieval with a Diffractive Micro Lens Array

2014 ◽  
Vol 8 (4) ◽  
pp. 251-259
Author(s):  
Xiyuan Liu ◽  
Karl-Heinz Brenner
Keyword(s):  
Phase Retrieval ◽  
Lens Array ◽  
Micro Lens Array ◽  
Micro Lens

The elliptical micro-lens array in the application of the LDA beam shaping

Optik ◽  
2014 ◽  
Vol 125 (24) ◽  
pp. 7149-7153 ◽  
Author(s):  
Bo Qiao ◽  
Ping Jiang ◽  
Huajun Yang ◽  
Xinwu Ma ◽  
Ming Xu
Keyword(s):  
Beam Shaping ◽  
Lens Array ◽  
Micro Lens Array ◽  
Micro Lens

Fabrication of micro-lens array on convex surface by meaning of micro-milling

2014 ◽  
Author(s):  
Peng Zhang ◽  
Yunlong Du ◽  
Bo Wang ◽  
Debin Shan
Keyword(s):  
Convex Surface ◽  
Micro Milling ◽  
Lens Array ◽  
Micro Lens Array ◽  
Micro Lens

An Anti-Counterfeiting Technique Based on Three-Dimensional Imaging Employing Micro-Lens Array

2015 ◽  
Vol 35 (s1) ◽  
pp. s111001
Author(s):  
郭书基 Guo Shuji ◽  
曹阿秀 Cao Axiu ◽  
史立芳 Shi Lifang ◽  
邓启凌 Deng Qiling ◽  
吴向东 Wu Xiangdong
Keyword(s):  
Three Dimensional ◽  
Three Dimensional Imaging ◽  
Lens Array ◽  
Micro Lens Array ◽  
Micro Lens
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