In this paper, a racetrack ring resonator design based on a subwavelength grating double slot waveguide is presented. The proposed waveguide scheme is capable of confining the transverse electric field in the slots and the gaps between the grating segments. This configuration facilitates a large light–matter interaction which elevates the sensitivity of the device approximately 2.5 times higher than the one that can be obtained via a standard slot waveguide resonator. The best sensitivity of the design is obtained at 1000 nm/RIU by utilizing a subwavelength grating double slot waveguide of period 300 nm. The numerical study is conducted via 2D and 3D finite element methods. We believe that the proposed sensor design can play an important role in the realization of highly sensitive lab-on-chip sensors.
Silicon-polymer hybrid slot waveguide
ring-resonator modulator