scholarly journals Three-dimensional characterization of extreme ultraviolet mask blank defects by interference contrast photoemission electron microscopy

2008 ◽  
Vol 16 (20) ◽  
pp. 15343 ◽  
Author(s):  
Jingquan Lin ◽  
Nils Weber ◽  
Matthias Escher ◽  
Jochen Maul ◽  
Hak-Seung Han ◽  
...  
2011 ◽  
Vol 84 (17) ◽  
Author(s):  
Judith Kimling ◽  
Florian Kronast ◽  
Stephan Martens ◽  
Tim Böhnert ◽  
Michael Martens ◽  
...  

2014 ◽  
Vol 104 (23) ◽  
pp. 232904 ◽  
Author(s):  
J. Schaab ◽  
I. P. Krug ◽  
F. Nickel ◽  
D. M. Gottlob ◽  
H. Doğanay ◽  
...  

2018 ◽  
Vol 98 (8) ◽  
Author(s):  
Alwin Klick ◽  
René Wagner ◽  
Malte Großmann ◽  
Laith F. Kadem ◽  
Till Leißner ◽  
...  

2016 ◽  
Vol 122 (3) ◽  
Author(s):  
Thomas Kaiser ◽  
Matthias Falkner ◽  
Jing Qi ◽  
Angela Klein ◽  
Michael Steinert ◽  
...  

2009 ◽  
Vol 80 (12) ◽  
pp. 123703 ◽  
Author(s):  
A. Mikkelsen ◽  
J. Schwenke ◽  
T. Fordell ◽  
G. Luo ◽  
K. Klünder ◽  
...  

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