Microlithographic lens for DUV scanner

2002 ◽  
Author(s):  
Tomoyuki Matsuyama ◽  
Yuichi Shibazaki
Keyword(s):  
Microlithographic Lens

Aberration functions for microlithographic lens

2006 ◽  
Author(s):  
Tomoyuki Matsuyama ◽  
Tomoko Ujike
Keyword(s):  
Microlithographic Lens ◽  
Aberration Functions

Error separation technique for microlithographic lens testing with null configurations

2001 ◽  
Author(s):  
Stephen K. Mack ◽  
Timothy Rich ◽  
James E. Webb ◽  
Paul G. Dewa ◽  
Horst Schreiber
Keyword(s):  
Separation Technique ◽  
Error Separation ◽  
Microlithographic Lens ◽  
Lens Testing

Microlithographic lens for DUV scanner

2002 ◽  
Author(s):  
Tomoyuki Matsuyama ◽  
Yuichi Shibazaki
Keyword(s):  
Microlithographic Lens
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