Self-compensation for trefoil aberration of symmetric dioptric microlithographic lens

2017 ◽  
Author(s):  
Wei-Jei Peng ◽  
Cheng-Fang Ho ◽  
Wei-Yao Hsu
Keyword(s):  
Microlithographic Lens

Aberration functions for microlithographic lens

2006 ◽  
Author(s):  
Tomoyuki Matsuyama ◽  
Tomoko Ujike
Keyword(s):  
Microlithographic Lens ◽  
Aberration Functions

Error separation technique for microlithographic lens testing with null configurations

2001 ◽  
Author(s):  
Stephen K. Mack ◽  
Timothy Rich ◽  
James E. Webb ◽  
Paul G. Dewa ◽  
Horst Schreiber
Keyword(s):  
Separation Technique ◽  
Error Separation ◽  
Microlithographic Lens ◽  
Lens Testing

Microlithographic lens for DUV scanner

2002 ◽  
Author(s):  
Tomoyuki Matsuyama ◽  
Yuichi Shibazaki
Keyword(s):  
Microlithographic Lens
Sign in / Sign up

Export Citation Format

Share Document