Optical Vortex Pair Creation using a Continuous Face-sheet Deformable Mirror

Author(s):  
Denis W. Oesch ◽  
Darryl J. Sanchez ◽  
Patrick R. Kelly
1996 ◽  
Vol 54 (3) ◽  
pp. 2369-2378 ◽  
Author(s):  
N. R. Heckenberg ◽  
M. Vaupel ◽  
J. T. Malos ◽  
C. O. Weiss

2009 ◽  
Vol 60-61 ◽  
pp. 185-188
Author(s):  
Li Tian ◽  
Xiao Ying Li ◽  
Da Yong Qiao ◽  
Bin Yan

A new type of continuous face-sheet micro deformable mirror was designed and fabricated based on SOI (Silicon-on-Insulator) technology for high optical efficiency applications in adaptive optics system. SOI provided a Silicon-Insulator-Silicon structure, and the insulator-layer of the three-layer structure was taken as etch-stop layer in deep silicon etching, which made the suspended bulk silicon membrane obtained easily. And the reflective face did not suffer etch-step due to the protection of insulator-layer. The mirror was composed of 5-um-thick and 10-mm-diameter flexible bulk silicon membrane, and actuated by 69 electrostatic actuators which evaporated on glass substrate. SOI and glass wafer were bonded together by anodic bonding, forming a separation gap of 15um between the mirror face and electrostatic pad, which offered a maximum effectual displacement of 5um by considering the pull-in effect. Fabrication process was introduced in detail. Bulk silicon micromachining was employed, methods mainly include Inductivity Coupled Plasma (ICP) etching and Si/Glass anodic bonding technique.


2021 ◽  
Author(s):  
Masoud Taleb ◽  
Mario Hentschel ◽  
Harald Giessen ◽  
Nahid Talebi

2008 ◽  
Vol 47 (33) ◽  
pp. 6300 ◽  
Author(s):  
Robert K. Tyson ◽  
Marco Scipioni ◽  
Jaime Viegas

1995 ◽  
Vol 247 (1-2) ◽  
pp. 156-162 ◽  
Author(s):  
Yoshihisa Enomoto ◽  
Sadamichi Maekawa

2012 ◽  
Vol 503 ◽  
pp. 169-173
Author(s):  
Wei Min Wang ◽  
Feng Gang Tao ◽  
Jian Fei Zhang ◽  
Jun Yao

A new hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror is proposed, a mirror array with 19 elements is fabricated by a surface micromachining process. This design has a good fitting capability and a fast dynamic response. The fabricated sample is tested by an optical profiler. Simulation and test results indicate that it has a small aperture size, a high fill factor, a fast response time and a high working bandwidth. This new device provides a possibility of manufacturing a large-actuator-count DM for high speed wavefront control.


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