Extended gas-lifetime operation of very high-repetition-rate CO2 lasers using dissociation products of an organic macromolecule

1985 ◽  
Author(s):  
R. MARCHETTI ◽  
E. PENCO ◽  
M. CAVAIOLI ◽  
G. SALVETTI
Keyword(s):  
Repetition Rate ◽  
High Repetition Rate ◽  
Co2 Lasers ◽  
High Repetition ◽  
Organic Macromolecule ◽  
Very High

High-Power, High-Repetition-Rate Pulsed CO2 Lasers and their application in EUV lithography sources

2016 ◽  
Author(s):  
Yezheng Tao ◽  
Alex Schafgans ◽  
Slava Rokitski ◽  
Michael Kats ◽  
Jayson Stewart ◽  
...  
Keyword(s):  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Co2 Lasers ◽  
High Repetition ◽  
Euv Lithography

scholarly journals Calibration of an echelle spectrograph with an astro-comb: a laser frequency comb with very high repetition rate

2012 ◽  
Author(s):  
David F. Phillips ◽  
Alex Glenday ◽  
Chih-Hao Li ◽  
Gabor Furesz ◽  
Andrew J. Benedick ◽  
...  
Keyword(s):  
Repetition Rate ◽  
Frequency Comb ◽  
Laser Frequency ◽  
High Repetition Rate ◽  
Echelle Spectrograph ◽  
High Repetition ◽  
Very High

Investigation of Spark-Gap Discharge in a Regime of Very High Repetition Rate

2010 ◽  
Vol 38 (10) ◽  
pp. 2752-2757 ◽  
Author(s):  
H. Rahaman ◽  
J. W. Nam ◽  
Sang H. Nam ◽  
K. Frank
Keyword(s):  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Spark Gap ◽  
Very High

Prospects for very high repetition rate lasers for microlithography

2000 ◽  
Author(s):  
Igor Bragin ◽  
Vadim Berger ◽  
Rainer Paetzel ◽  
Uwe Stamm ◽  
Andreas Targsdorf ◽  
...  
Keyword(s):  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Very High

New generation of very high repetition rate subnanosecond pulsed UV sources

1999 ◽  
Author(s):  
F. Druon ◽  
Francois Balembois ◽  
Patrick M. Georges ◽  
Alain Brun
Keyword(s):  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
New Generation ◽  
Very High
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