Prospects for very high repetition rate lasers for microlithography

2000 ◽  
Author(s):  
Igor Bragin ◽  
Vadim Berger ◽  
Rainer Paetzel ◽  
Uwe Stamm ◽  
Andreas Targsdorf ◽  
...  
Keyword(s):  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Very High

scholarly journals Calibration of an echelle spectrograph with an astro-comb: a laser frequency comb with very high repetition rate

2012 ◽  
Author(s):  
David F. Phillips ◽  
Alex Glenday ◽  
Chih-Hao Li ◽  
Gabor Furesz ◽  
Andrew J. Benedick ◽  
...  
Keyword(s):  
Repetition Rate ◽  
Frequency Comb ◽  
Laser Frequency ◽  
High Repetition Rate ◽  
Echelle Spectrograph ◽  
High Repetition ◽  
Very High

Investigation of Spark-Gap Discharge in a Regime of Very High Repetition Rate

2010 ◽  
Vol 38 (10) ◽  
pp. 2752-2757 ◽  
Author(s):  
H. Rahaman ◽  
J. W. Nam ◽  
Sang H. Nam ◽  
K. Frank
Keyword(s):  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Spark Gap ◽  
Very High

New generation of very high repetition rate subnanosecond pulsed UV sources

1999 ◽  
Author(s):  
F. Druon ◽  
Francois Balembois ◽  
Patrick M. Georges ◽  
Alain Brun
Keyword(s):  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
New Generation ◽  
Very High

Very high repetition-rate electro-optical cavity-dumped Nd: YVO4 laser with optics and dynamics stabilities

2015 ◽  
Vol 336 ◽  
pp. 273-277 ◽  
Author(s):  
Xuesong Liu ◽  
Zhaohui Shi ◽  
Yutao Huang ◽  
Zhongwei Fan ◽  
Jin Yu ◽  
...  
Keyword(s):  
Repetition Rate ◽  
Optical Cavity ◽  
High Repetition Rate ◽  
High Repetition ◽  
Yvo4 Laser ◽  
Very High

Performance of very high repetition rate ArF lasers

2000 ◽  
Author(s):  
Jean-Marc Hueber ◽  
Herve Besaucele ◽  
Palash P. Das ◽  
Rick Eis ◽  
Alexander I. Ershov ◽  
...  
Keyword(s):  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Very High
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